【作者】 马惠铖；

【导师】 刘骏跃；

【作者基本信息】 西安科技大学 ， 检测技术与自动化装置， 2010， 硕士

【摘要】 加速度传感器广泛应用于工业生产的很多领域,但是传统的加速度传感器由于其自身的一些缺点使得它无法在一些高精尖领域应用。声表面波加速度传感器作为一种灵敏度极高,线性度好以及抗干扰能力极强的惯性传感器已经在航空航天和汽车制造等领域内得到了广泛应用。因此,深入研究声表面波加速度传感器的传感机理及其检测技术,不仅具有理论意义,而且具有工程实用价值。本文改进了传统悬臂梁式声表面波加速度传感器的差动结构,并完善了整个声表面波加速度传感器的信号检测系统。本论文在悬臂梁式SAW加速度传感器研究方面取得的具体成果有:1.为配合后续的混频电路以及全新的频率测量方法,对传统声表面波加速度传感器的差动方案进行了改进,抑制了温度干扰因素对加速度传感器的影响,而且降低了其加工制作的难度。2.为了使得频率计数单元能正常工作,设计了低通滤波放大电路,使用Multisim10对其进行了仿真研究,仿真结果表明所设计的滤波放大电路完全满足系统要求,各项参数均接近理论值。3.通过对于系统输出频率的测量可以计算出相应加速度的大小,传统的等精度测频法存在对标准信号计数的±1误差,本文将传统等精度测频法进行了改进消除了±1误差。4.传统的测频法对于低频信号的测量误差较大,本文提出了利用基于声表面波带通滤波器的一种新的测频法,提高了低频信号的测量精度。更多还原

【Abstract】 Acceleration sensors are widely used in many areas of industrial production. But due to their own shortcomings, traditional acceleration sensors are impossible in some areas of application of sophisticated. SAW accelerometer as a high sensitivity , excellent linearity, as well as strong anti-interference ability inertial sensors has been widely used in aviation and aerospace and automotive manufacturing field. Therefore, the in-depth study of SAW accelerometer sensing mechanism and detection technology, not only of theoretical significance, but also of practical engineering value.This paper improves the differential fabric of the traditional cantilever-type SAW acceleration sensor and perfect the whole signal detection system of it. The exact achievements in the cantilever-type SAW acceleration sensor of this paper are following by:1: To tie in with the follow-up mixer circuit and the brand-new measurement method, the traditional differential programs of the SAW acceleration sensor has been improved, which well restraint the impact on the accelerometer out of the temperature disturbance, and also reduces the difficulty of its manufacture.2: In order to make frequency count unit can work properly designs low-pass filter amplifier circuit uses Multisim10 for a simulation research of them. The results show that the designed filter amplifier circuit is fully meet the system requirements all the parameters are close to the theoretical value.3: We can calculate the corresponding acceleration through the measurement of the system output frequency. The traditional method of equivalent precision frequency measurement have±1errors of standard signal, this paper have improved the method to eliminate the error.4: The traditional frequency measurement has a larger bandwidth for low-frequency signals. This paper presents a new frequency measurement which applied the all-pass filter of SAW to improve the low-frequency signal measurement accuracy.更多还原