【作者】 陶猛；

【导师】 肖汉宁；

【作者基本信息】 湖南大学 ， 材料学， 2010， 硕士

【摘要】 硅晶片掺杂用固态磷扩散源是一种片状的、常温下性能稳定、在高温下能分解并稳定释放出P2O5的功能陶瓷材料。本文采用溶胶-凝胶法合成了LaP5O14粉体,并以该粉体为原料,通过常压烧结制备了硅晶片掺杂用固态磷扩散源片。采用DSC-TG、DTA-TG、XRD、SEM等测试手段对试验中的样品进行表征,得到了以下结论：在800℃保温5h的煅烧制度下,合成了以柱状结构LaP5O14为主晶相的粉体,晶体尺寸为10μm；LaP5O14粉体能够在850℃分解并释均匀放出P2O5,失重量与时间近似于线性关系,粉体在850℃保温5h的失重量与LaP5O14含量成正比。同时研究表明,随着煅烧温度的提高,LaP5O14的含量呈现先增加后减少的趋势,晶体尺寸先增大后变小；随着保温时间的延长,LaP5O14含量增加,晶体尺寸增大。以LaP5O14粉体为原料加入磷酸盐玻璃作为烧结助剂,在900℃保温1h的烧结制度下制备了磷扩散源片,随着烧结温度的提高,磷扩散源样品中LaP5O14分解、含量减少,气孔率先减小后增大,晶粒尺寸和密度先增大后减小,磷扩散源片的失重速率降低；随着保温时间的延长,磷扩散源样品中LaP5O14分解、含量减少,气孔率降低,晶粒尺寸增大,磷扩散源片的失重速率降低；磷酸盐玻璃的加入对磷扩散源片的组成没有影响,但随着加入玻璃量的增加,磷扩散源片气孔率和软化点降低,密度先增加后减小；随着扩散温度的提高,磷扩散源片的失重速率提高。更多还原

【Abstract】 Solid-state phosphorus diffusion source for doping silicon wafer was a functional material which was flaky,stable at room temperature,and it can be decomposed and stablely released P2O5 at high temperature. In this artile, Solid phosphorus diffusion source chips were produced by sintering method using LaP5O14 powder as materials which was prepared by sol-gel process. The samples were characterized and analyzed by DSC-TG、DTA-TG、XPD、SEM.The results shows:The LaP5O14 power can be obtained by calcinateing the gelatinate at 800℃for 5 hours, and the obtained LaP5O14 is about 10μm in length. P2O5 can be released from the LaP5O14 powder with constant rate at 850℃, and there was a good linear relationship between the weight loss of the powder and the heat preservation time, the percent of the powder’weight loss at 850℃for 5h was proportional to the content of LaP5O14. With the calcinateing temperature increasing,the content and the grain size of LaP5O14 was increased and then decreased. Along with the holding time growing, the content and the grain size of LaP5O14 was increased.The chips were produced by liquid state sintering using LaP5O14 powder,at 900℃for 1h,adding 6% phosphorus glasses as aids. As the growth of sintering temperature,the content of LaP5O14 was decreased,the gas porosity was increased and then decreased, the grain size and the density were decreased and then increased;Along with the holding time increasing, the content of LaP5O14 and the density were decreased, the grain size was increased. But with adding number of phosphorus glasses, the gas porosity and the sofening temperature were decreased,the density was increased and then decreased.更多还原