【作者】 何渝；

【导师】 温志渝；

【作者基本信息】 重庆大学 ， 仪器科学与技术， 2010， 硕士

【摘要】 将环境中的振动能转换为电能的MEMS微型振动发电机是近年来国内外研究的热点。本论文在国家自然科学基金资助下,针对微型振动发电机抗冲击能力差、易疲劳等问题,开展基于微液滴介质的微型静电式振动发电机的关键技术研究,具有重要的科学意义和应用价值。论文在分析微型振动发电机研究现状和发展趋势的基础上,提出基于微液滴介质的微型静电式振动发电机新结构,分析该微型静电式振动发电机的工作原理,建立相应的理论模型并进行模拟仿真;研制出基于微液滴介质的微型静电式振动发电机宏尺寸原理样机;开展该微型静电式振动发电机的MEMS加工工艺的初步探索研究。论文主要研究内容:①研究分析了微型振动发电机的研究现状与趋势,提出了基于微液滴介质的微型静电式振动发电机新结构,分析了该结构静电式振动发电机的工作原理,建立了相应的理论模型;②采用COMSOL Multiphysics软件对基于微液滴介质的微型静电式振动发电机的Teflon驻极体电场分布和微液滴在微腔体中的运动过程进行模拟仿真,在此基础上开展了该微型静电式振动发电机的系统级仿真;③研制出了基于微液滴介质的微型静电式振动发电机的宏尺寸原理样机,对原理样机进行了测试:在加速度为2g,负载为1M?情况下,工作频率为3Hz,输出电压峰-峰值为1.21V,输出功率为0.73μW;④开展了基于微液滴介质的微型静电式振动发电机的MEMS加工工艺探索研究,完成了版图设计。更多还原

【Abstract】 The MEMS micro-generator which converts the mechanical vibration energy of environment into electrical energy is a research hotspot in recent years at home and abroad.In the support of National Natural Science Foundation, for the current spring or cantilever-based micro-vibration generator’s problems, such as poor impact resistance ability, easy fatigue and so on, to carry out the key technology research of micro-droplet dielectric based micro-vibration generator, with important scientific and application value.The new structure of electrostatic vibration generator based on micro-droplet dielectric was proposed in the analysis of micro-vibration generator status and development trend. We analyses the working principle of this micro electrostatic vibration generator, established the theoretical model and have carried out some simulations; Developed the micro-droplet dielectric based micro electrostatic vibration generators’macro size prototype; To carry out the preliminary exploration of MEMS processing on this micro-electrostatic vibration generator.The main contents of this paper are:①We analyzed the micro-vibration Generator Status and Trends. The new structure of electrostatic vibration generator based on micro-droplet dielectric was proposed. Analyzed the working principle of this micro electrostatic vibration generator, established the theoretical model;②We carried out simulations of teflon electret electric field distribution in micro-cavity and the movement process of micro-droplet in micro-cavity. After all carried out the system-level simulation of electrostatic vibration generator based on micro-droplet dielectric;③We developed and tested the micro-droplet dielectric based micro electrostatic vibration generators’macro size prototype: when the acceleration is 2g, load is 1M?, the working frequency is 3Hz, the output voltage (peak-peak)is 1.21V, the output electricity is 0.73μW;④We carried out the preliminary exploration of MEMS processing on micro-droplet dielectric based micro electrostatic vibration generator, finished the layout design.更多还原