【作者】 王东丽；

【导师】 施卫；

【作者基本信息】 西安理工大学 ， 物理电子学， 2009， 硕士

【摘要】 SnO2是一种宽带隙氧化物半导体材料,禁带宽度Eg=3.6-4.0eV。SnO2薄膜由于具有对可见光透过性好、紫外吸收系数大、电阻率低、化学性能稳定以及室温下抗酸碱能力强等优点,已被广泛的应用在太阳能电池、电热材料、透明电极材料以及气敏材料等方面。喷雾热解法以其设备简单、成本低、制备样品快等优点成为一种很有应用潜力的制备SnO2薄膜的方法,另外喷雾热解法在镀膜玻璃的工业化生产中有着广阔的应用领域。以SnCl4·5H20和NH4F为原料,本文采用超声喷雾热解法在石英玻璃管内壁制备掺F的二氧化锡薄膜。运用正交方法设计实验,研究了制备SnO2：F薄膜过程中的五种影响因素,如：F浓度(F% mol)、Sn浓度(Sn% mol)、酒精浓度、喷涂时间以及基底温度,对薄膜方阻和在可见光范围内的平均透过率的影响,得出最佳工艺组合为基底温度为500℃,F的浓度为2%(mol)、Sn的浓度为15%(mo1)、酒精浓度为30%(m1)、喷涂时间为15s。最后利用回归分析,建立了光透过率、方阻与F%、Sn%、酒精浓度、基底温度以及喷涂时间这五个影响因素之间的线性关系。通过实验分析了SnO2：F透明导电薄膜方阻随温度变化的实验规律,用SPSS软件拟合,得到的二次拟合曲线很好的反映了薄膜的温度随方阻变化的特性。拟合优度R2=0.883,二次拟合回归方程R=87.688+0.10t+4.25×10-5t2。更多还原

【Abstract】 SnO2 is a kind of wide-band oxide semiconductor material with a bandwidth of Eg=3.6-4.0eV. Due to its excellent characterics, such as high light transmission in visible region, low resistivity, high chemical stability and so on, it has been widely used in many fields such as solar cells, electric heating devices, transparent electrodes, and gas sensors, etc.The spray pyrolysis technique has a great potential to prepare the tin dioxide films because of its unsophisticated equipment, low-cost and high deposition rate. And the spray pyrolysis technique has been widely used in industrial production on coated glass.The spray pyrolysis technique was used to prepare SnO2:F films on the quartz glass tube substrate by using SnCl4·5H2O and NH4F as raw material.The Fluorin-doped SnO2 thin film has very excellent photoelectrical character. The orthogonal experiment was used to design the experiment, and analyze the preparation influence-factors of the SnO2:F transparent conductivity films such as the substrate temperature, F%, Sn%, the percentage of alcohol and the time of ultrasonic spray which influences the films on visible light transmission and the sheet resistance. By this study, optimal proportionings were confirmed, namely, the substrate temperature is 500℃,2% of F%(mol),15% of Sn%(mol),30%(ml) of the percentage of alcohol,15 minutes of the time of ultrasonic spray. In the end, the regression analysis was used to found the linear relation between the light transmission and the sheet resistance and influence factors (the substrate temperature, F%(mol), Sn%(mol), the percentage of alcohol and the time of ultrasonic spray). The value of the light transmission and the sheet resistance will be estimated ahead of schedule in our following experiments by Regression equation.The relationship between the resistance of SnO2:F transparent conductor films and various temperature was obtained by the experiment. A quadratic curve obtained by the SPSS Software reflects the rule of the sheet resistance with the vary temperature. The goodness of fit is R2=0.883 and the equation of quadratic curve is R=87.688+0.10t+4.25×10-5t2.更多还原