【作者】 王占彬；

【导师】 林彬；

【作者基本信息】 天津大学 ， 机械制造及其自动化， 2009， 硕士

【摘要】 超精密微位移工作台系统在现代尖端工业生产和科学研究领域内占有极为重要的地位。高精度和高分辨率的精密微位移工作台系统的各项技术指标是各国高技术发展水平的重要标志。本实验室已经针对工作台在先进结构材料、多孔质气体润滑技术以及直接驱动技术等关键技术方面进行了较为深入的研究,为研制出性能均衡,适合工业环境应用的大行程超精密工作台打下坚实的基础。本次课题的研究目的是实现空气静压工作台关键技术的实用化。通过对工作台结构设计方面的调研和论证,对气体静压支承的数值计算分析、对导轨的精度设计进行的讨论,旨在为掌握空气静压工作台的关键技术,具备研制工作台的能力做些前期的准备工作。本文的研究重点放在空气静压工作台的实用化设计方面,并为掌握其加工生产的关键技术做了许多认证,为今后早日实现工作台批量生产做了大量实质性的工作。本文结合实验室前面的工作及课题的实际情况,主要进行空气静压工作台结构设计方面的调研和论证,空气静压气浮支承的理论计算,以及导轨精度分析。文中初步完成了工作台整体结构布局方面的设计:工作台整体采用二维形式,水平布置;工作台上层采用一个直线电机驱动,下层采用两侧双直线电机驱动;工作台静导轨采用花岗岩大理石材料,动导轨采用铝合金材料;工作台的气体支撑技术采用真空负压吸附式设计,可以获得高刚度。另外还针对工作台的实用化总结了若干需要注意的问题。文中采用有限差分法编制了基于气体润滑的气浮支承技术数值计算程序;在气体润滑形式的基础上选用了环面节流器;根据数值程序计算出承载能力、刚度及流量;分析了基于环面节流器气体润滑支承的性能,并根据计算结果分析了影响其性能的各种因素。文中还针对空气静压导轨精度方面做了一些分析,在简化模型基础上,定性分析了影响空气静压导轨精度方面的因素,并分析了其传递规律,为今后在设计更高精度的空气静压工作台奠定了坚实的基础。更多还原

【Abstract】 Ultra-precision micro-displacement stage system plays an important role in modern industry and scientific research field. The high precision and high resolution are the important symbols of the development of high-tech level in each country. The further research in key technology of advanced structural materials, porous gas lubrication and direct-drive has been made by the previous research team, which has laid a solid foundation for developing a ultra-precision stage with such features, as large travel, balanced performance and suitable for industrial application. The goal of the research is realizing the practical application of the key technology of the aerostatic stage. By carrying out summarizing the structure of the aerostatic stage, the numerical analysis on the air lubrication, the precision design on the guide-way, the research aim at mastering the key technology of the aerostatic stage research and the manufacturing capacity.The paper has done a lot of certification. And this is essential for the practical application of the aerostatic stage and mastering the key technology of the production. In this paper, it focus on the research and demonstration of the structure design for the stage by comparing with pre-work of the lab, the numerical analysis of the air lubrication, the precision analysis of the aerostatic guide-way.In this paper, the initial global structure design for the aerostatic stage has been finished. The two dimensional form and horizontal layout is adopted. The top guide-way is arranged one linear motor and the lower is arranged dual ones on the right and left sides. The material of the static guide-way is granite marble and the moving guide-way is aluminum alloy. The air lubrication technology is adopting vacuum adsorption for obtaining high stiffness. Otherwise, the paper refers to some problems of the practical application for the stage.The program of the air bearing adopts finite difference method. The torus restrictor is selected. And the performance of air lubricated bearing torus-based Restrictor is analyzed in accordance with the results of the numerical analysis, such as carrying capacity, stiffness and flow. And also according to the result, the proposal of the structure optimization has been made.In this paper, the precision of the aerostatic guide-way is analyzed. Based on the simplified modal, the factors of leading to the error of the movement precision are analyzed by qualitative analysis. Also the rule of the error transmission is analyzed. This precision analysis is very essential for improving the movement precision of the aerostatic stage.更多还原