【作者】 鲍路路；

【导师】 孔德义；

【作者基本信息】 中国科学技术大学 ， 微电子学与固体电子学， 2009， 硕士

【摘要】 高量程、耐冲击的高g值硅微加速度计在导航、国防、冲击测量等领域具有重要的应用背景。与常规的低量程加速度计不同,高g值加速度计的设计和封装存在许多难题,有必要进行深入的研究。本文在对各种硅微传感器特点进行比较的基础上,结合现有的工艺条件,选择了适用于高冲击环境、有较高抗过载性能的扭摆电容式加速度计作为研究对象。对其工作原理和数学模型进行了阐述和研究。综合考虑了高g值加速度计的功能参数后,设计计算了加速度计的结构尺寸。并且利用有限元的分析方法,对计算得到的高g值加速度计进行了静力学和动力学的仿真,以验证该结构的量程和抗高过载能力。阻尼特性是加速度计的另一项重要指标,本文采用理论分析的方法,通过阻尼孔给加速度计设计了合理的阻尼器。结构确定以后,又考虑了该结构的工艺流程,并绘制版图、投片制造。本文最后又给出了该加速度计微小电容的检测电路,初步搭建了测试平台。更多还原

【Abstract】 High g shock accelerometer can be used in many fields, such as navigation, national defense, shock environment measurement and so on. To be different with common low g accelerometer, the design and process of high g accelerometer will be more challengeable. It is necessary for us to make a profound research.After a brief introduction and comparison about series types of existing high g accelerometer, considering the current MEMS micro-fabricated process technics, torsional capacitance accelerometer is selected to meet the high g shock environment. First of all, its principle and mathematics modal are discussed. Depending on the functional guideline, the optimized structure parameters are selected. After that, Finite element method is used to simulate the high g accelerometer’s behavior, both static analysis and dynamic analysis, and to validate the sensitive structure’s surviving ability under over loading acceleration. The squeeze film damping is another influential complication. After the theoretical damping analysis of the sensitive structure, the proper damper has been choiced through damping holes on the mass. After the micro-fabricated process flow of the torsional capacitance accelerometer is confirmed, professional software L-Edit is used to design the marks and layouts. The sensitive structure of accelerometer has been produced in our lab. In the last chapter, a micro-capacitance read-out circuit is designed for the calibration of the current accelerometer.更多还原