组件针孔疵病检测仪测试技术研究

【作者】 夏扬；

【导师】 常本康；

【作者基本信息】 南京理工大学 ， 光学工程， 2008， 硕士

【摘要】 组件针孔疵病检测仪主要用于对阴极组件进台前做最后检测,淘汰不合格产品,为下一步划片做前台准备,同时也能对外协生长的镓砷外延材料进行表面检测。本课题研究的系统利用了数字图像处理和计算机自动控制,对阴极组件和外协生长的镓砷外延材料进行自动化、科学化、智能化的表面分析。课题所研究的系统应用前景广泛,将来可能应用于多种光电子器件以及光电半导体材料的工艺生产,有利于推动光电子器件以及相关产业向计算机自动化方向的发展。本论文阐述了自动聚焦的基本原理,分析了多种自动聚焦算法的可行性,设计了在组件针孔疵病检测仪软件系统中的自动聚焦算法。另外,本论文对图像分析算法也做了一定的研究,对怎样提高图像质量提出了一些建议。组件针孔疵病检测仪硬件系统在前人的基础上有所改进,加装了可变夹具、同轴透射光源、减重装置等等。同时,系统中基于硬件的软件编程也做了很大的改进,文中对此也做了详细的介绍。组件针孔疵病检测仪软件系统的使用方法,如何设计出与用户交互的友好界面,如何实现各个软件模块对组件针孔疵病检测仪有效控制;组件针孔疵病检测仪系统对GaAs表面的缺陷检测、自动聚焦以及组件针孔等能够表现系统性能的项目做了大量实验是本论文的又一重点。最后,通过对本论文工作总结,分析了工作中的不足以及对以后工作的展望。更多还原

【Abstract】 Groupware Pinhole-Blemish Detected Device is used for cathode groupware detection before finished product. Besides, the device is also used for surface detection of GaAs material.The system researched by this dissertation is based on digital image processing and computer auto control and it makes the surface detection of cathode groupware and GaAs material automatic, scientific and intelligent. In future, the system will be widely used in photoelectron industry.This dissertation expatiate the basic theory and analyze several arithmetic feasibility of auto focus, design arithmetic of auto focus in the Groupware Pinhole-Blemish Detected Device. Otherwise, the studies of image analyze arithmetic also in this dissertation, and some suggestions of promotion the quality of image have been given.Groupware Pinhole-Blemish Detected Device’s hardware system on the basis of previous improvements, the installation of a variable fixture, coaxial transmission source, weight loss devices, and so on. At the same time, hardware-based system in the software programming has done a great improvement, when also done this in detail.The another point of this dissertation is how to use it, how to design the UI (User Interface) and how to control it. Experiments of surface detection, auto focus and pinhole blemish are also important.Finally, although summarize of the dissertation, analyze the insufficiency of work and the expectation of the future.更多还原