【作者】 董辉平；

【导师】 孙运强；

【作者基本信息】 中北大学 ， 测试计量技术及仪器， 2008， 硕士

【摘要】 随着声表面波器件在无线通信和高性能传感技术中的应用越来越广泛,对声表面波器件也提出了更高的要求:响应频率要求更高,更宽的带宽,更小的尺寸及更低的插入损耗,甚至实现无线传输、无线无源传感。相应地,器件的制作也越来越复杂,随之而起就更好的性能和模型的预测与仿真也提出了越来越多的要求。声表面波器件仿真不仅能节省开发声表器件开发成本,缩短开发周期,而且由于本文中关于声表面温度传感器的仿真设计是从理论方法研究入手,更有利于声表面波传感器件的开发。本文是在关于声表面波传感技术研究项目的基础上提出的。首先对压电理论及声表面波理论进行了研究,接着用四种仿真模型(δ函数、等效电路、P矩阵和COM耦合模型)以及ANSYS压电耦合分析方法对声表面波谐振型温度传感器电学谐振特性:插入损耗和反射特性、传感器栅模特性以及谐振导纳特性进行了仿真研究。最后,对在仿真基础上设计制作的谐振型温度传感器谐振特性进行了试验验证,验证了仿真结果与试验结果的一致性以及各种仿真模型和ANSYS压电耦合分析方法综合应用是SAW技术在应力、气体浓度等传感领域设计应用十分有利的研究方法。更多还原

【Abstract】 There has been a tremendous increase in demand for high quality components over the past decades with a expeditious growth in the telecommunications and transducers industry. As the usage of surface acoustic wave (SWA) devices in wireless communication and techno-sensor aspects, more demands were advanced for SAW devices:higher operating frequencies, wider bandwidth, less sizes, lower insertion losses so much as wireless transfers and wireless-passive sensor. Accordingly, there are crucial significance of modeling and simulation for more complication SAW devices.SWA devices simulation not only save on the cost of development acoustic devices, curtail development periods, also make much more for the exploitation of SAW sensor, because of the research of simulation and modeling being in the base of theory method.The basic of thesis is the research item of SAW dynamic test. Firstly, we had researched the electrics-resonance-characteristic of SAW resonance such as inserting loss, scattering coefficients, gate die, resonance admittances characteristic with SAW simulate models(delta function model, equivalent circuit model, P-matrix model and couple-of-modes model ) and ANSYS piezoelectricity coupling analyses method in the base of research of piezoelectricity theoretics and SAW theoretics. Then, we had made the SAW temperature sensor. Lastly, we had tested electrics resonance characteristic and temperature response characteristic of the SAW temperature sensor and received good result.更多还原