【作者】 田美强；

【导师】 张大明；

【作者基本信息】 吉林大学 ， 微电子学与固体电子学， 2008， 硕士

【摘要】 本论文针对极化聚合物电光开关的微波电极系统进行了基础性的研究工作。首先介绍了光开关的研究意义,有机聚合物材料的优势以及聚合物电光开关在国内外的研究进展;通过晶体的电光调制理论引出了极化聚合物的电光效应,为极化聚合物电光开关的研究奠定了理论基础;比较分析了各种电极结构的差异,选取共面波导(CPW)行波电极进行研究;利用保角变换理论导出了CPW行波电极各参数的解析表达式,为电光开关微波电极的设计提供了理论依据;结合软件模拟与理论计算,详细分析了共面电极的有效电场分布,多节反相电极结构对定向耦合型电光开关特性的影响,讨论了电极尺寸、波导位置与各性能参数之间的变化关系,设计了基于极化聚合物的不同衬底材料的电光调制器以及单节、两节、三节、四节反相电极结构定向耦合型电光开关的共面行波电极系统;自制了高频测试用微波探针并搭建了一套行波电极的测试系统;利用半导体工艺制备了多个不同衬底材料、不同介质层的CPW行波电极;对行波电极、调制器、定向耦合型电光开关进行了性能测试,分析了测试结果,并阐明了Si衬底行波电极损耗较大的原因。更多还原

【Abstract】 It has put forward higher requirements for the information processing speed, transmitting speed and storage capacity with the development of information science. But the traditional electricity network is unable to satisfy this requirement because of its "electronic bottleneck". Meanwhile, there has urgent need of optical integrated devices of large capacity, easy connectivity, and resistance to electromagnetic and wireless in the fields of computer, telecommunications, and optical information processing. As a result, the optical network becomes the main way to solution this problem. And as it precisely conforms to this demand, the polymer E-O (electro-optic) devices has gradually developed into a focus in recent years.Besides a logic operation device, optical switch is also able to do the conversion to optical transmission line and integrated optical signal. It has one or a number of selected transmission ports. As important optoelectronics and integrated optical devices, optical switch and its arrays are one of the main factors that affect performance of the optical network, because of their core position. It completely depend on optical switches, optical filter, erbium-doped fiber amplifier (EDFA) of new generation, dense wavelength division multiplexing (DWDM) technology, and progress of other technology.The poled polymer electro-optic switch discussed in this paper is a member of the optical switch family. With its favorable performance of high switching speed (speed of response in the order of picoseconds or femtoseconds), it shows wide applications in the new generation of all-optical network and system of RoF, and has become one of the international focus of many hot research. In order to achieve the goals and good performance, a detailed study of the microwave electrode system should be done. This paper mainly covers the following aspects:1. By analyzing many kinds of configurations of the micro-wave electrode system of poled polymer electro-optic switches, we selected CPW traveling -wave electrode.2. We got the analytical expression of the characteristic impedance Z 0, microwave equivalent refractive index n m, ohmic lossαc, dielectric lossαd, and other parameters of CPW traveling-wave electrode system according to conformal mapping theory. And all of this work provided a theoretical basis for designing the microwave electrode.3. We analyzed the effective field distribution of CPW traveling-wave electrodes in detail. Additionally, by combining software (ADS2005a) simulation and theoretical calculations (the errors in the calculation are in the scope of the license), we discussed the relationship of parameters of electrode system such as Z 0、n m、α0、Vπ、Δf 3dB and its performance parameters such as W、G、t、εr、L and so on. Then the CPW traveling-wave electrode of poled polymer electro-optic modulator is designed finally with Vπ=12.4V、Δf 3 dB =22.8GHz(Si substrate); Vπ=13.1V、Δf 3 dB =156.5GHz(SiO2 substrate); and Vπ=13.4V、Δf 3 dB =35.4GHz(Glass substrate).4. We analyzed the effect of multiple electrodes structure to the performance of the directional coupler electro-optical switch based on coupled mode theory, got the optical field dispersion of E0y0 mode by single-mode transmission condition, and optimized parameters of electrodes and waveguides. And finally, the directional coupler electro-optic switches with switching voltage of 21.7V、9.59V、6.47V、4.47V were designed.5. After introducing the preparation process of CPW traveling-wave electrodes in detail, we prepared several CPW traveling-wave electrodes with different substrate materials and dielectric layers.6. A microwave probe used for high-frequency test is designed and fabricated. And then we built a testing system for electrodes by using microwave vector network analyzer (Anritsu37269C), the six-axes stage, high-frequency microwave probe, infrared CCD camera, monitor, pneumatic vibration isolation platform, DC and AC sources.7. We tested various of CPW traveling-wave electrode, illustrated the phenomenon of larger losses of CPW traveling-wave electrode based on Si substrate than other substrates. Besides that, poled polymer electro-optic modulator and the directional coupler electro-optical switches are tested preliminarily. Testing results showed that transmission loss was 31dB, return loss was 12dB, half-wave voltage was about 8V, and modulation bandwidth was 3.2GHz. In the end of the paper, we summarized the main problems of the current, and identified the future direction.更多还原