【作者】 肖云凤；

【导师】 桂卫华；

【作者基本信息】 中南大学 ， 控制理论与控制工程， 2004， 硕士

【摘要】 近年来，随着石英晶体在电子技术领域越来越广泛的应用，我国石英晶体行业迅速发展，但用于晶体生产过程中的高精度频率监控设备基本上依赖进口，且价格昂贵，这与国内晶体制造业对高精度频率监控设备不断增长的需求相矛盾，大大制约了国内晶体制造业的发展。 本文阐述了一种基于DSP的新型频率监控系统的开发研究，该系统能在线检测石英晶片在研磨过程中的不断变化的频率，自动控制晶片研磨厚度。以往的进口频率测控仪器都采用低速8位单片机作为控制核心，本系统首次采用数字信号处理器DSP代替单片机为控制核心，同时，应用了PLL锁相环构成扫描频率信号源。DSP芯片选用C2000系列的TMS320F240，主要完成频率响应信号的采集、频率测试和过程监控逻辑信号的产生、晶片频率及频差的计算、频率设定和显示、人机接口信号处理等任务；PLL锁相环路部分主要由鉴相器、环路滤波器、电压控制振荡器构成，产生稳定连续的频率扫描信号，它是本系统的关键电路。 论文首先在系统总体结构设计中介绍了DSP芯片、锁相环技术及可编程逻辑器件这些基础知识，然后全面系统的论述了本系统的硬件设计方案、工作原理和软件应用程序设计，并介绍了一些抗干扰措施，最后为加强系统的抗干扰性提出了将非全数字PLL用全数字PLL(DPLL)代替的改进意见。实验证明，本系统可获得满意的测量控制效果，可实现石英晶片研磨过程自动化。更多还原

【Abstract】 With the quartz crystal’s broader application in the field of electron, Home quartz crystal industry develops rapidly. While, highly precision frequency measure and control apparatuses used in producing process are depended on import basically and expensive, which contradicts with the increasing requirements for such apparatuses in home crystal manufacturing and restricts the development of home crystal industry mostly.This paper describes the research of a new frequency measure and control system, which can measure the crystal’s variational frequency in the process of rubbing on line and can control automatically the rubbing thickness. Old imported apparatuses’ control core are all 8 bit low-speed SCM, now, DSP (Digital Signal Processor) is adopted as core instead of SCM in this new system firstly and PLL is also adopted to make up of frequency-scanning part. TMS320F240 is a DSP CMOS chip in C2000 series. This chip can collect frequency respond signals, can produce frequency measure and control logical signals, can calculate wafer’s resonance frequency and frequency difference, can enact and display frequency, and can process signals from keyboard. The PLL part, made of PD, Loop Filter, Voltage Control Oscillator, is the key circuit of the system to produce steady and continuous frequency scanning signal.This paper firstly introduces the basic knowledge of DSP CMOS chip, PLL and Programmable Logic Devices in the system whole frame design, then discusses the hardware design plan, work principles and application software design generally and by the numbers, and introduces some anti-jamming measures. In the end, one scheme is put forward to strengthen the system’s anti-jamming ability, that is to use a DPLL CMOS chip instead of the existing PLL. It illustrates that well-pleasing effect can be gained by the control system.更多还原