【作者】 张贤高；

【导师】 黄新堂； 贺平；

【作者基本信息】 华中师范大学 ， 凝聚态物理， 2004， 硕士

【摘要】 透明导电氧化物薄膜在光电产业扮演着很重要的角色。目前应用广泛的透明导电氧化物薄膜主要有氧化铟锡薄膜(ITO)、氧化锌铝膜(AZO)、掺锑氧化锡(ATO)等。 铟锡氧化物(ITO)是制造透明电极的重要材料。ITO薄膜导电性好，对可见光透明，对红外反射性强。ITO结构中的氧空位和锡掺杂使得它具有很强的导电性，较大的能带间隙宽度(E_g＞3eV)使得它具有很强的光透明性。 因为ITO薄膜的优良光电性能、很强吸附能力、硬度高、化学性质稳定，使得ITO薄膜广泛地应用于很多领域：太阳能电池、液晶显示器、现代战机和巡航导弹的窗口等。 在铟锡氧化物(ITO)的研究领域里，有关ITO薄膜的研究进行了几十年。为了满足光电产业界对ITO薄膜的强大需求，ITO粉体的制备生产技术和薄膜的形成取得了很大的成效。目前，工业界主要是先将ITO粉制成靶材，再利用直流磁控溅射工艺，在材料的表面形成ITO薄膜。制备ITO粉体的方法有：液相沉淀法、减压-挥发氧化法、喷雾热分解法、共沉淀法、溶胶-凝胶法等。 金属铟和锡都是我国富产的有色金属，但是我国所用的ITO材料仍然来源于进口。因此，我们迫切要求改变原料廉价出口、产品高价进口的局面，以满足高技术领域对ITO薄膜材料的需求，创造巨大的经济效益与社会效益。 在这篇文章里，我们尝试用改进的水热法来制备ITO纳米粉末。将铟锡氢氧化物置于充满氩气的高压釜，在300℃，2MPa的条件下就可制得ITO的纳米颗粒。该方法与以前的方法相比，反应条件更加的柔和，在300℃就生成了ITO粉末，粒径大小为10-20nm，并且产物粒径的大小与前驱物的大小没有关系，这在工业界具有很重要的应用意义。更多还原

【Abstract】 Transparent conductive oxide (TCO) film plays an important role in pholoelectron industry. There are many kinds of transparent conductive oxide. The main transparent conductive oxide include indium tin oxide (ITO), Al-doped ZnO (AZO), tin antimony oxide (ATO) etc.ITO is important material of making the transparent electrode. ITO has both high conductivity and high optical transmittance. The subst-itutional oxygen vacancies and tin contributing to its high conductivity. The high optical transmittance of ITO films is a direct consequence ofit being a wide band gap (Eg>3eV) .Due to its excellent electro-optical properties such as high electrical conductivity, transparency to light, high substrate adherence, good hardness, and chemical inertness the applications in various fields: transparent electrodes for display devices, transparent coatings for solar energy heat mirrors, windows films etc.Among all of the investigations on ITO, the research on its thin films has been the most interesting issue for several decades. To satisfy the requirements of the wide applications of ITO thin films, a lot of research efforts have been made on the preparation of ITO films, and various manufacturing techniques such as evaporation, reactive electron evaporation D. C. and R. F. magnetron sputtering reactive thermal deposition and sol-gel process have been successfully developed.Our country has much metal of Indium and tin, but the ITO was mainly imported. Therefore, it is critical that we must change the position of importing ITO in high price and exporting material in low price.In this work, the ITO nanometer powders were tried to be prepared by the hydrothermal method.Mere, we report a very simple technique for the preparation of ITO nano-particles at a temperature as low as 300 C. The method was improved based on the hydrothermal method. Put the precursor (indium-tin-hydroxide) into a stainless steel autoclave filled of Ar and heat the autoclave at the temperature of 300 C and pressure of 2 MPa for 3 hours. ITO nano-paticles was prepared. The shape, particle size and crystallize condition of ITO nano-paticles were analyzed by XRD and TEM. Compared this method with the past, the circumstance of preparation is much softer. It has the very important meaning in the industry field.更多还原