功率集成电路中高压器件的设计

【作者】 方邵华；

【导师】 何杞鑫；

【作者基本信息】 浙江大学 ， 微电子学与固体电子学， 2004， 硕士

【摘要】 功率集成电路是集成电路的重要分支，作为一个系统的控制部分(弱电)和执行部分(强电)的桥梁，它在电力电子、自动控制、家电通信、汽车电子等领域扮演着一个重要的角色。功率集成电路中的高压器件由于高压大电流的性能要求一直是研发功率集成电路中的关键和难点，并直接影响着功率集成电路的发展。目前，功率集成电路是国外许多著名微电子公司的研发重点，我国则处于相对落后的状态。 本文首先介绍了国内外功率集成电路的发展状况，然后介绍了高压集成电路中的几种终端技术、RESURF效应、器件模拟的基本理论和MEDICI器件模拟软件，最后对三种型号的高压功率器件的击穿特性进行了分析和计算机模拟，指出了影响器件电压的关键的物理和结构参数，并对这三种型号的器件进行模拟，得出的电特性曲线和参数基本上与公司给出的一致。 本文的工作主要是在SUN工作站上利用MEDICI二维器件仿真软件完成的，论文最后附上这三个器件的仿真程序及相应的曲线和参数，为今后的功率集成电路的研发打下了基础。更多还原

【Abstract】 Power integrated circuit is one of the most important branches of integrated circuit. As the bridge of the control and execution part of the system, it plays an important role in the fields of electronic power, automatic control, communication and automotive. Owing to the requirement of big current and high voltage, the design of power devices is the key point in the research on power integrated circuit, and it has directly influenced the development of power integrated circuit. Therefore, many big microelectronics companies now focus on power integrated circuits.First, the general introduction of power integrated circuit is presented in this paper. And then some terminal techniques on PIC, devices simulation theory, RESURFs effect and MEDICI software are presented. At last three kinds of high voltage power devices have been designed and simulated. Based on the analysis of the breakdown voltage and electric field distribution of the high power devices, the key physics and structural parameters effects on the breakdown voltage are found. The electrical property curves and parameters are basically consistent with those offered by the company.To complete most of design work and get some useful conclusion, 2-D devices simulation software MEDICI was used. The project is believed to be valuable to the future research on PIC.更多还原