电感传感器测量电路设计与改进

【作者】 洪小丽；

【导师】 戴一帆；

【作者基本信息】 中国人民解放军国防科学技术大学 ， 机械电子工程， 2003， 硕士

【摘要】 电感测微仪是一种分辨率极高、工作可靠、使用寿命很长的测量仪，应用于微位移测量已有比较长的历史。国外生产的电感测微仪产品比较成熟，精度高、性能稳定，但价格昂贵。国内生产的电感测微仪存在漂移大、工作可靠性不高、高精度量程范围小等问题，一直与国外的传感器水平保持一定的差距。在超精密加工技术迅猛发展的今天，这种测量精度越来越显得不适应加工技术发展的需求。本文针对这些问题，对电感传感器测量电路进行了一定的设计和改进。对电感测微仪的正弦波生成电路、交流分档放大电路、带通滤波电路、相敏检波电路、数据采集电路等进行了精确的分析和相应的设计，并提出了必要的改进措施。在电路的制作与调试方面，从电路的合理布局与布线、电子元器件的选择与安装、电路的调试等方面做了大量的工作，并通过软件实现数据处理，使测量精度得到进一步的提高。通过一系列的静态测试实验，对传感器的性能进行了一定的评价。实验表明，电感测微仪性能比较稳定，在量程为-20μm到+20μm时，每20分钟的漂移量为10nm，灵敏度为281mV／μm，分辨率优于10nm，重复精度约为0.12％F．S，线性度为0.2％F．S。本文通过对电感测微仪的各种改进，为其成为一个通用化、仪器化、商品化的产品打下了基础。更多还原

【Abstract】 Inductive displacement sensor, with a virtually infinite resolution, highreliability and extremely long life, has been applied to the measurement of micro-displacement for a long experience. The product made abroad has very high accuracy and reliability due to the ripe technology, but it is very expensive as well. There are some defects in domestic sensor such as high temperature drift, low reliability, small measuring range etc. Against these defects, this paper proposes a series of improvements on the measuring circuit of inductive displacement sensor, adapting it to the development of ultra-precise technology. On the basis of accuracy analysis, some techniques are combined to improve the measuring precision on the sine wave generating circuit, AC signal amplifying circuit, band-pass filtering circuit, phase sensitive detection circuit, data acquisition circuit and so on. Many changes have been made about the layout and wiring of circuit board, the choice of circuit and components, the assembly and debugging of circuit and so on. The data processing software further improves the precision. By a series of testing experiments, the static performance of the sensor is obtained. The experimental results indicate that if the temperature is normally constant, the sensor will be very stable. Under the measurement range of -20μm to +20μm, the drift is 10nm/20minute; sensitivity is 281Mv/μm; resolution is higher than 10nm; repeatability is 0. 12% F. S; linearity is 0.2% F. S. The improvements on the sensor have laid the foundation for its further unification, instrumentalization and commercialization .更多还原