【作者】 苏娟；

【导师】 王华民； 刘庆丰；

【作者基本信息】 西安理工大学 ， 控制理论与控制工程， 2003， 硕士

【摘要】 目前，用于晶体生长的区熔式单晶炉配套使用的是国外进口或国内生产的真空电子管式高频感应加热电源，存在诸如可靠性差、电子管使用寿命短、操作不安全、变换效率低等问题。由于工作频率非常高(1MHz～2.5MHz)，现有技术成熟的大容量全固态感应加热电源几乎无法满足要求。因此，设计并生产超高频的全固态感应加热电源变得尤为重要。本课题就是基于这种需要，研究背景选定为高频(1MHz～2.5MHz)情况下采用功率MOSFET为主器件的多管并联逆变电源，因此高频情况下的功率MOSFET的驱动电路以及在并联时出现的问题成为主要的研究对象，这些为以后电源装置的设计调试、减少器件成本及提高工作效率提供良好的前期准备。 本文主要研究高频功率MOSFET的驱动电路和在动态开关模式下的并联均流特性。首先简要介绍功率MOSFET的基本工作原理及静态及动态特性，然后根据功率MOSFET对驱动电路的要求，对驱动电路进行了参数计算并且选择应用了实用可靠的驱动电路。此外，对功率MOSFET在兆赫级并联由于不同的参数影响而引起的电流分配不均衡问题做了仿真研究及分析。最后采用实验方法对兆赫级功率MOSFET双管并联在动态开关模式下的均流特性进行研究并采用了一些行之有效 西安理工大学硕士学位论文的措施使得电流分配基本均衡。 实验证明，实验采用的均流措施是非常有效的，取得了良好的均流效果。更多还原

【Abstract】 At present, the crystal growth equipment is equipped with vacuum tube HF(lMHz-2.5MHz) induction heating power supply. While this supply has many disadvantages, such as low reliability, short longevity of vacuum tube, operational safety, low transfer efficiency. Existing huge capacity solid induction heating power supply cannot meet this need. So it is urgent to design and produce this HF induction heating power supply. This task is based on MOSFET multidevices parallel inverter on HF(lMHz-2.5 MHz). It’s very necessary to design the drive circuit and discuss problems that maybe occur on HF. This provides some experience for the designing and debugging of electrical source, reduce the cost and advancing efficiency.This thesis pays more attention to the HF MOSFET drive circuit and characteristics of balancing parallel MOSFETs’ currents in dynamic mode. At first the principle and characteristics in static and dynamic mode of power MOSFET are introduced. Grounding on the characteristics, the parameters of drive circuit are calculated and an applied and reliable drive circuit is proposed. Next, parallel MOSFETs maybe make currentsof MOSFETs unbalanced because of the unequal parameters of components on HF, which is simulated and analysed. At last, research on the characteristics of two parallel power MOSFETs on megahertz in dynamic mode are experimented and some available measures are made to balance the currents.Experimental results show the measures are very effective and good effect is got.更多还原