【作者】 蔡秀梅；

【导师】 秦岚；

【作者基本信息】 重庆大学 ， 仪器科学与技术， 2002， 硕士

【摘要】 微定位机构是指行程小(一般小于毫米级)、精度高(亚微米级、纳米级)、灵敏度高的机构，它是精密机械和精密仪器的关键部件之一。它既可作为微进给和微调部件，也可作为工艺系统误差的静态和动态补偿部件。许多高科技领域都需要微定位技术的支持，压电微定位技术由于有诸多优点，正成为近年国内外的研究热点。 本文在深入分析研究了国内外微定位技术的基础上，研究了一种空间分布压电驱动的多自由度微定位新技术，完成了微定位工作台定位原理研究，建立了微定位工作台位姿控制模型。采用空间并列分布式压电驱动实现微定位工作台的三维平移和三维旋转。在四层平行平板间并列分布九个PZT微驱动器，每层的三个驱动器摆放在一个正三角形的三个顶点上。建立了九个PZT微驱动器伸缩量组合与最上层平板位置、姿态之间转换的位姿控制模型，通过分别控制九个PZT微驱动器的单个伸缩量，实现载物台(最上层平板)的六自由度微定位。 开展了PZT微驱动器特性的研究与实验，提出了在本项目中减小PZT微驱动器自身误差的方法。 设计了空间分布压电驱动的多自由度微定位实验系统，将多路PZT微驱动器、电感传感器、A/D转换卡、计算机、D/A转换卡、PZT驱动电源集成为定位控制实验系统，采用Visual Basic 6.0语言编写了控制软件，设计了实验方案并进行了实验研究。 对微定位系统进行了初步的误差分析，提出了改进措施。 本文研究的空间分布压电驱动的多自由度微定位新技术，从运动原理上消除了各运动方向间的干扰，从而达到将运动方向间的交叉耦合误差减小至可以忽略的数量级。完成六自由度微定位工作台系统集成，实现低干涉、高分辩力、超微进给的高精度三维平移和三维偏转。为MEMS和光通信部件制造以及其它高科技领域的超精密定位工作台的研制提供实用新技术。 实验结果验证了本文研究的空间分布压电驱动的多自由度微定位方案的正确性和实用性，为进一步的工作奠定了基础。更多还原

【Abstract】 Micro position mechanisms refer to those mechanisms who have small journey (less than millimeter order), high precision (sub-micron order or micro millimeter order) and high sensitivity. It’s one of the key components of fine mechanics and precision instrument. It can be used as fine control component and static state error compensation or dynamic error compensation component. Lots of high-tech fields depend on micro position technique. Since piezoelectric micro position technique has a great deal strongpoint, it is turning into study hotspot both here and abroad.Base on the research of existing micro position technology, a new technique of multi DOF (degree of freedom) micro position with PZT actuators has been put forward and studied in this paper. The author studied the principle of micro position and created the position control matrix. Multi PZT actuators have been distributed spatially in order to realize three-dimensional shifting and three-dimensional tilting. Nine PZT actuators are distributed among four platforms, and in each layer there are three PZT actuators placed on the vertexes of an equilateral triangle. In terms of the positioning demand to the worktable, the strain of each PZT actuator can be worked out. So, the worktable can realize six DOF micro position by controlling each PZT actuator.Experimental characteristics of PZT actuators were studied and the methods of reducing PZT actuators’ error were brought forward.Six DOF micro positioning system with PZT actuators was designed. PZT actuators, inductance sensor, A/D, computer, D/A and power supply were integrated into a experiment micro positioning system. Control software was programming with Visual Basic 6.0.The new technique of multi DOF (degree of freedom) micro position with PZT actuators has no interference with each direction, so the cross coupling error can be reduced to neglectable order of magnitude. The micro positioning system was integrated and it can carry out six DOF micro position highprecisionly. It provides practical new technique for high-tech field such as MEMS and optical communication.The experiment has verified the principal and system of multi DOF micro position with PZT actuators. Advice of improvement and prospect of the next stage study are also presented in this paper.更多还原