【作者】 赵艳；

【导师】 陶纯匡；

【作者基本信息】 重庆大学 ， 光学工程， 2002， 硕士

【摘要】 衍射是最常见的一种光学现象，由于近代激光和信息技术的出现与发展，使它在精密测量领域显现出广泛的应用前景。智能激光衍射光强测量仪就是这样的一种精密测量仪器。基于该仪器，论文从光学衍射理论出发，结合半导体技术、微机接口技术等，阐述了它的基本原理、结构组成及应用。文章从衍射的角度探讨了微距测量的相关问题。一束激光通过狭缝（细丝）产生衍射图样，线阵SSPA从图样中心横向取样，把光强信号转换成电脉冲，再放大采样保持，经ADC0804模／数转换后输入计算机，运算出暗纹中心所在SSPA光敏元，这样就得到计算缝宽（直径）的重要参数—暗缝中心间距。和传统的衍射过程相比，由于使用半导体传感器和后期数据的计算机处理，最终的测量结果更精确、更科学、更快速。SSPA光敏元中心距仅有几到几十微米，以它为单位得到的暗纹中心距使测量结果更趋精确。文章最后着重讨论了测量误差的产生、来源以及减少误差的方法。衍射法测微距融合了近代的激光、半导体、信息处理技术，成为一种新兴的测量技术，广泛应用于科学实验、工业检测、微仪器等领域，随着人们对其进一步的认识研究，将会有更为广阔的应用前景。更多还原

【Abstract】 Diffraction, Which is the most common optical phenomenon, presents an extensive application prospect in the field of precision measurement because of the development of Laser and information technology. Intelligent Measuring Instrument of Laser Diffraction Light Intensity is the kind of fine measuring instrument. This paper puts emphasis on formulating the basic principle, structure and application of the measuring instrument by coupling of the theory of diffraction, sensor technology and interface technology.This paper discusses some problems of microspur measure on the basis of diffraction. Diffraction pattern that is generated through a branch of Laser exposures a slit (filament) is sampled by linear SSPA and intensity signal is transferred into electric pulse that is amplified, sampled and hold. Then after ADC0804 A/D transferred the signal is inputted into computer. Finally by means of data processing the key parameter―spacing interval of shade stripe center is achieved. Comparing with the traditional diffraction instruments, the intensity instrument makes a feature of precision, intelligent and utility.In the end of this paper, measuring error of the instrument is discussed and the method of reducing error is introduced in brief.Microspur measure by diffraction method that includes the technology of Laser, sensor and information processing has been an emerging technology and is used widely in scientific experiment, industrial measuring and detecting apparatus. With the further research, the intensity instrument will has a broader prospect.更多还原