【作者】 徐如；

【导师】 屈力扬；

【作者基本信息】 杭州电子科技大学 ， 电路与系统， 2012， 硕士

【摘要】 随着集成电路的快速发展,对测量其上的半导体器件各种参数要求越来越高,其中电压和电阻是主要的测量对象。目前探针测试仪采用多探针法测量电参数的方法应用比较广泛,而传统的探针测试仪测量效率较低、精度低和测量的参数较少。因此需要开发一套基于探针测试仪的高性能测量仪器。本论文论述了国内国外的半导体测量仪的发展状况,在改造后的ST-103A探针测试仪的基础上并结合单片机技术和人机界面技术组成了一套测量电参数的测量系统。该仪器的主要功能是对贴片元器件进行电参数(电压、电阻)测量和功能测试,操作简便,工作效率高和成本低等特点。在自动控制方面,引入了步进电机来控制探针平台在X、Y和Z轴上的移动,实现了探针平台的移动自动化,X、Y轴的步进分辨率可以达到0.0095mm,移动的速度可达1.9mm/s;在视频监控方面,引入视频监控系统后,操作者可以在PC机上清楚地观察载物台移动和测量情况；在测量电路方面,设计了电压测量电路和电阻测量电路,可以对贴片元器件的电参数(电压、电阻)实现精确测量,测量的精度可达12位,其中电压测量电路的测量电压范围为-10V-10V；编写串口通信模块使PC机能够与单片机实现实时通信；设计人机控制界面方便操作者在PC机上控制探针测试仪的测量活动。本论文的特点是：基于改造后的探针测试仪测试贴片元器件的电参数,并在下位机系统中加入了视频监控和步进电机控制技术,在上位机中使用了MFC设计人机界面,操作者通过人机界面控制探针测试仪可以有效的提高测试效率和可靠性,为贴片元器件的电参数测试提够了一套有效的测试方案。更多还原

【Abstract】 With the rapid development of the integrated circuit, the requirement of measuring semiconductor devices’all kinds of parameters are getting higher and higher, among them the main measuring objects are voltage and resistance. Currently, the multi-probe method is widely used to measure parameters, while the traditional probe station measure objects with the disadvantages of lower efficiency and accuracy, and also measure less parameter. Thus, the development of a high-performance probe station is quite necessary.The thesis discusses the situation of both domestic and foreign semiconductor development. Based on the transformation probe station ST-103A, combination with microcomputer and human-computer interface technology, a new measurement system for measuring parameter is produced. The instrument’s main function is measuring SMT parameters (include voltage, resistance etc), this instrument have the advantage of easy operation higher efficiency and lower cost.In the part of auto-control, the probe platform in the X、Y and Z axis movement is controlled by stepping motor, it can be realized mobile automation. The X, Y stepping motor’s resolution can reach 0.0095mm and its moving speed can reach 1.9mm/s. In the part of video monitoring, the operator can observe the movement of probe station and measurement clearly through video monitoring system. In the part of measurement circuit, through voltage measurement circuit and resistance measurement circuit, SMD’s parameters can be accurate measured, the accuracy of measurement can reach 12 bits, the measure voltage range for voltage measurement circuit from-10V to 10V. By using serial-port the upper computer can communicate with microcomputer conveniently. Through the human-computer interface operator can control probe station and measure sample.In the dissertation, the reformed probe station can be used to test patch components’electrical parameters, and the lower computer is being added to video monitoring system and stepping motor control system. To make probe station improve its testing efficiency and reliability, programmer add man-machine interface to the upper computer. So, the efficiently solution for testing patch components emerges as the times require.更多还原