【作者】 严飞；

【导师】 唐霞辉；

【作者基本信息】 华中科技大学 ， 物理电子学， 2011， 硕士

【摘要】 大功率射频电源是射频CO₂板条激光器的重要组成部分。本论文主要研究射频CO₂板条激光器的电源系统,对它激式射频电源的原理和电路参数进行分析与设计,借助EDA仿真软件对模块进行了仿真设计。对电源进行了负载特性测试。内容包括以下几方面:（1）分析自激式与它激式电子管电源及固态电源的特点,选择它激式电子管电源作为500W射频板条激光器的激励电源。在它激式射频电源总体结构的框架下,进行了射频电源的总体电路设计。包括电路的具体组成部分及技术参数。（2）本论文设计300W功放模块,由晶振产生一个微弱的微瓦级射频信号,经过一级BJT高频150mW晶体管放大电路,再接10W MOS管放大电路,后接300W推挽MOS管放大电路进行三级放大。利用multisim仿真软件对各级放大电路进行仿真,确定工作参数。（3）设计8KW电子管放大电路。根据FU-113F四级电子管的工作曲线,从中取出一些典型点,通过MATLAB的数值计算功能,建立FU-113F四级电子管的PSPICE模型。然后根据具体的要求进行综合设计,最后进行仿真分析。（4）论述功率控制与检测原理,最后进行整机实验。包括假负载实验,激光器负载实验,研究其功率输出特性。本论文对它激式射频电子管电源进行了详细的理论分析与实验研究,希望对射频板条CO₂激光器的发展做出贡献。更多还原

【Abstract】 RF power supply plays an important role for the high power RF-excited CO₂ laser system. This thesis aims to research a RF power supply system of the high-power CO₂ lasers, the principles and working parameters of the circuit components of separate-excited RF power supply circuit has been analyzed. The simulation design of RF power supply circuit has been carried out by RF simulation software EDA. Through the load system experiment, the thesis researches characteristics of RF power supply. The main results are as follows.（1） Characteristic of self-excited tube RF power supply, separate-excited tube RF power supply and solid-state power supply have been analyzed in the thesis, and the scheme of separate-excited RF power supply as the power source of 500W RF-excited CO₂ laser has been chosen. The circuit of a RF power supply system is designed, including the scheme of RF power and technical parameters.（2） The 300W amplifier module which includes the crystal oscillator, 150mW BJT amplifier module, 10W MOS amplifier module and 300W Push-pull MOS amplifier module have been designed in the thesis. The simulation analysis of the each amplifier module has been carried out by the simulation software multisim. Further, working parameters is chosen.（3） The 8KW tube amplifier module has been designed in the thesis. Based on the static working curve of quadrupole bunch of shoot tube, FU-113F, the PSPICE model of the FU-113F is established through the use of MATLAB of numerical computation function. According to the specific requirements, 8KW amplifier module has been integrated designed and simulated in the thesis.（4） The principle of the power control and power test has been discussed in the thesis. Through the load system experiments which include the dummy load experiment and the laser load experiment, the power output characteristics are systematically researched.By making detailed theoretical analysis and experimental research of separate-excited separate-excited RF power supply, the thesis hopes to make the contribution to the RF-excited CO₂ laser development.更多还原