【作者】 吴爱文；

【导师】 荣伟彬；

【作者基本信息】 哈尔滨工业大学 ， 机械电子工程， 2011， 硕士

【摘要】 为了对纳观世界进行更加清楚的认识,充分发挥纳米技术在材料、生物、医学、信息等领域技术创新中的促进作用,纳米技术研究和纳米制造装备的研制成为各国科技竞争的焦点之一。而原子力显微镜(Atomic Force Microscopy, AFM)是目前用于纳米研究最重要的工具之一。其基本原理是通过检测针尖与纳观世界的力交互作用,实现纳米尺度的形貌检测、纳米材料特性表征,以及纳米操作的精确控制。本文在国家自然科学基金计划项目“纳米结构与器件跨尺度三维操纵与互连的基础研究”的支持下,自主开发了基于AFM原理的双探针纳米镊子激光测力系统,并完成其精密标定。本文针对AFM纳米镊子在三维纳米操作过程中力检测与控制的需要,基于光学偏转法力检测的工作原理,设计了双探针纳米镊子的激光测力系统结构。设计充分考虑了激光测力系统各部分之间的相互干涉以及各部件对光路产生干涉,使其具有紧凑的空间结构,较好的检测精度和良好的操作性,并建立了该纳米镊子激光测力的实验系统。另外,本文设计了一种新型的用于AFM激光测力系统标定装置,采用该标定装置,可同时实现纳米镊子激光测力系统的法向和侧向灵敏度标定。并采用了非线性标定方法,补偿光电位置检测器非线性误差,有效的拓宽了力检测的线性范围,可实现AFM纳米镊子在三维纳米操作过程中精确的力检测与控制。最后,应用该纳米镊子激光测力系统开展了样品表面形貌扫描、探针与基底间的pull-off力和摩擦力检测的实验研究。实验结果表明,该测力系统能够精确测量实验操作过程中探针与操作对象间的交互作用力,可实现几十皮牛级精度的微小力检测。AFM纳米镊子激光测力系统的研究对精确可控的三维纳米操作与装配方法和技术的进一步发展具有一定的推动作用,对纳米科学技术的研究具有一定的实用价值。更多还原

【Abstract】 In order to better understand the nano-world and thereby promote applications of the nanotechnology in fields of material, biology, medicine, information, etc., the research of nanotechnology and the development of the nano-fabrication equipments have became a focus of technological competition among countries. AFM (Atomic Force Microscopy) is one of the most important tools used in the nanotechnology. By detecting interaction forces between the AFM tip and the nano-world, AFM can be used for the nanoscale imaging of surface morphology, nano-material properties characterization, and accurate control of nano-manipulation. This thesis is suppoted by the National Natural Science Foundation of China through the project“the basic research on multi-scale manipulation and connction of three-dimensional nano-structures and devices”, aiming to develop a laser force-measuring system for a home-built dual-probe AFM nanotweezer, and complete its accurate calibration.For the force detection during the three-dimensional operation and control, a laser force measuring system, based on the principle of optical deflection method, was designed for the AFM nanotweezer. Interferences among system components and laser paths are fully considered and the designed system has high detection precision, compact structure and favorable operability. Moreover the AFM nanotweezer laser force measuring experimental system was established.In addition, a new calibration device was developed for sensitivity calibration of the AFM laser force measuring system. Both the normal and lateral sensitivity of the laser force measuring system can be obtained with this calibration device. A nonlinear calibration method has been used to compensate the nonlinearity of PSD (photoelectric position detector), so as to effectively broaden the linear range of the force measurement, thereby providing precise force detection and control in the three-dimensional manipulation through the AFM nanotweezer. Finally, a series of experiments were completed by using the laser force-measurement system, such as sample surface morphology scanning, probe-substrate pull-off force and friction measurement. Experimental results show that the force-measurement system can provides accurate forces description between tip and objects in the process of nanomanipulation, and be capable of very high force detection with a precision of dozens of pico-Newton.The research of AFM nanotweezer laser force-measurement system promote the development of precisely controllable three-dimensional nanomanipulation and nanoassembly methods, and has certain practical value for the study of nano technology.更多还原