【作者】 丛志浩；

【导师】 陈兴林；

【作者基本信息】 哈尔滨工业大学 ， 控制科学与工程， 2011， 硕士

【摘要】 光刻机是IC制造业的核心装备,而工件台掩膜台系统又是工件台系统中运动控制的核心组成部分,具有扫描、上下片、定位、调平调焦等一些功能。其运动控制的性能对光刻机的工作效率及精度都有着非常大的影响。近年来光刻机技术发展迅速,对工件台掩膜台系统的性能也越来越高,这就对工件台控制系统的设计提出了很高的要求。而工件台系统因为具有6自由度,以及其高精度快响应的要求,六自由度之间的耦合作用就对工件台系统的性能带来了很大的影响,因此,需要进行首先解耦设计,才能对其进行进一步的控制。首先,本文针对工件台系统的耦合情况,着手研究耦合的概念,判断耦合程度来确定是否需要对系统进行解耦设计,若需要设计应该对系统进行怎样的设计来消除耦合。在判断完耦合程度之后,研究了一些基于古典控制理论、现代控制理论、智能控制理论的解耦方法,比较了其优缺点、适用范围,选择合适于工件台系统解耦设计的状态反馈解耦方法。其次,对工件台系统进行了建模,先通过研究工件台所需要完成的功能,和运动特点,建立一个适当的机械模型,并选择了合适的电机来作为工件台运动部分的驱动元件。之后研究了电机的位移和工件台质心的位移之间的关系,来建立方程组,通过分析音圈电机的模型,将整个系统的位移关系、力学关系、电磁力等关系联立起来,建立了控制系统模型。然后,对系统进行了解耦设计,将六自由度相互耦合的MIMO系统,转化为输入和输出一一对应的SISO系统,然后依据工程上应用最为广泛的三闭环系统的设计方法,对SISO系统进行了控制,使其达到了较好的性能指标。对于系统的机械谐振,设计了陷波器,来消除其带来的不利影响。通过仿真验证了设计的结果。最后,对工件台的运动轨迹进行了规划,给出了整个硅片的曝光过程。更多还原

【Abstract】 Lithography is the core of IC manufacturing equipment, mask platform workpiece table system is the core motion control system components, with the features such as scanning, the upper and lower pieces, positioning, leveling and focusing.The driver of this motion control board belongs to the driver module of character device, and its driver system realizes through standard VxWorks I/O system. The motion control performance of lithography has a very big impact.on efficiency and accuracy. Lithography technology is developing rapidly in recent years, the workpiece table mask platform sets are increasingly high performance of the system, which controls the design of the workpiece table made very high demands.The workpiece table system with 6 degrees of freedom as well as its quick response to the requirements of high accuracy, the coupling between the six degrees of freedom to the performance of the workpiece table system is a big impact, therefore, the need for the first decoupling design in order to further its control.Firstly, for the coupling of the workpiece table system,After the judging the degree of coupling, the study of some based on classical control theory, modern control theory, intelligent decoupling control theory, to compare their advantages and disadvantages, scope.choose the State feedback decoupling method which suits for the workpiece table system.Secondly, the workpiece table system is modeled, first by studying the parts needed to complete the function table, and movement characteristics, the establishment of an appropriate mechanical model, and select the appropriate units of motor sport as part of the workpiece drive components.Then studying the displacement relationship of the motor and the centroid of the workpiece table to establish the equations.By simultaneous up the Displacement relationship, mechanical relationship, electromagnetic force relationship, etc. Then establish the control model.Then, design the decoupling of system,changing the six degrees of freedom coupled MIMO system into one-to-one SISO system.Then choose three closed-loop method which used most widely in engineering to control the SISO system,to achieve a well performance. Notch filter designed to eliminate the adverse effects of mechanical resonance.Design is verified by simulation results.Finally, the trajectory of the workpiece station was planned, given the exposure of the wafer process.更多还原