【作者】 沈金华；

【导师】 刘国栋；

【作者基本信息】 哈尔滨工业大学 ， 仪器科学与技术， 2010， 硕士

【摘要】 产品的小型化和精密化,使得人们对表面轮廓形貌测量的要求日益迫切。共聚焦显微技术有效地解决了高分辨率、非接触式测量的问题,能够实现光学层析,并通过计算机合成三维立体图像,从而成为医学、生物学以及工业等领域的重要工具和研究手段。课题“激光共聚焦信号采集及控制技术的研究”是黑龙江省科技攻关项目“多光针表面形貌测量系统”中的一个子课题,主要目标是实现该系统的信号采集和控制技术,并进行了深入的研究。首先对差动激光共聚焦测量系统的原理进行了详细的介绍。设计了差动共焦光电信号探测系统、精密位移测量系统、显微视觉测量模块的信号采集及控制系统。其次对系统进行软件的整体设计,整个软件分为:共焦测量模块、精密视觉位移测量模块、显微视觉模块。共焦测量模块主要用于采集聚焦误差信号的输出值,利用输出值判定驱动物镜移动,进行大小两种量程的选择测量;精密视觉位移测量模块主要是将物镜的移动在线阵CCD上造成的像素位置变动转化为物镜实际的位移量;显微视觉模块主要是对显微视觉系统拍摄序列图像并进行处理。最后通过实验,对光电转换电路进行了调试,对信号进行了数据采集,对精密位移测量系统和显微系统进行了标定。结果表明该系统工作性能良好。更多还原

【Abstract】 The analysis of optical tomography and reconstructing three-dimensional Image by computers makes confocal technique an important research method or instrument in medicine, biology, semiconductor industry, etc.The project "Research on Laser Confocal Signal Acquisition and Control Technology" is a sub-topic of key scientific and technological project of Heilongjiang Province, titled "Multi-optical Probe surface topography Measurement System ". This paper made research and design on signal acquisition and control technology of the confocal optical probe, precision vision displacement measurement and the micro-vision detection module.Firstly, this paper explains the measurement principle of differential confocal optical probe measurement system particularly, provides the general design of laser confocal measurement system and focus on carrying out circuit and mechanical structure design of two sensor systems: photoelectric conversion processing systems, precision visual displacement measuring system.Secondly,Then carries on software’s overall design to the system,the software is divided into:confocal measurement module, precise visual displacement measurement module, microscopic visual module. The confocal measurement module mainly uses in acquisit the value of the focusing error signal, then, using the value to decide whether to move the lens, to chose from the two kinds of measuring ranges ;The precise visual displacement measurement module is mainly the pixel position change which created by the lens’ displacement value as on linear array CCD, transforms to the reality high value; Micro-vision module is mainly to do the sequence image processing taken by the micro-vision system, and to make three-dimensional reconstruction combined with the height information of the image.Finally, Calibration Test and Ratin Test are carried out on Micro-Visual System and Precision Displacement Measurement System through the final simulation experiments, along with the data collection experiment .The results show that the system has a good performance.更多还原