【作者】 朱文俊；

【导师】 方玉明；

【作者基本信息】 南京邮电大学 ， 电路与系统， 2011， 硕士

【摘要】 微型化始终是当代科学技术发展的重要方向。随着微电子技术的发展,基于MEMS(微机械系统)技术的微传感器、微执行器得到了快速发展,在其各种驱动方式中,静电驱动占有重要地位,因此对静电微执行器的研究是非常必要的。在静电微执行器中,存在做快速吸合现象,也被称为pull-in失稳现象,它是静电微执行器的一个重要特征。现今国内外对于静电微执行器pull-in失稳问题的研究非常多,但考虑静电微执行器边缘效应的研究还是微乎其微。由于微型化器件灵敏度的增大,所以获得精确的pull-in点的相关参数都是非常必要的。本文在分析了国内外相关研究工作的基础上,基于能量法进行分析扭转式静电微执行器的pull-in失稳现象,把扭转式静电微执行器的边缘漏电场考虑到模型中去,建立更符合实际的物理模型,通过与ANSYS软件实际仿真结果相比较,论证了建立模型的准确性。本文首先通过求解忽略微执行器边缘电场效应的pull-in失稳参数,介绍了微执行器的pull-in机理,并重点分析了扭转式微执行器电极相对于极板的位置不同而对微执行器pull-in参数的影响和控制。然后介绍了漏电场对微执行器pull-in参数的影响,建立相关的漏电场的模型,在考虑漏电场的情况下,得出了pull-in现象的相关数据。通过实例分析,分别考察了扭转式微执行器的各项参数的变化对于pull-in电压和pull-in点的影响。最后通过ANSYS有限元分析软件建立出扭转式静电微执行器结构,考虑了上下极板之间的边缘效应进行求解,得出实际数据,通过与模型求解的数据相比较分析,说明了模型的精确性,并给出模型的适用范围。更多还原

【Abstract】 Miniaturization has always been the important direction in the development of modern science and technology currently. With the development of microelectronics technology, micro-actuators are growing rapidly based on the micro-sensors of MEMS (micro-electromechanical system) technology. Among their various actuation methods, electrostatic actuation is the most important method and therefore it is necessary to study the electrostatic micro-actuators. In the process of studying electrostatic micro-actuators, there is a quick pull-in phenomenon, which is also known as pull-in instability phenomenon, and which is an important feature of the electrostatic micro-actuators. Presently, many people at home and abroad are studying the pull-in instability problem of electrostatic micro-actuators, but the study of taking into account the fringing field effect of electrostatic micro-actuators can be negligible. As the sensitivity of miniaturizational devices increases, it is very necessary to obtain accurate data of pull-in points.Based on the analysis of the research work at home and abroad, this paper presents the analysis of the pull-in instability phenomena of electrostatic micro-actuator in the use of energy method. The fringing field effect is taken into account in the model of electrostatic torsion micro-actuator in order to establish more realistic physical model. By comparing with the results of the ANSYS software, the accuracy of model can be demonstrated.Firstly, the pull-in mechanism of electrostatic micro-actuator is introduced by solving the pull-in parameters without considering the fringing field effect in this paper. It focuses on analyzing the control and influence of the different electrode positions relative to the plate of electrostatic torsion micro-actuator on pull-in parameters.Then it presents the influence of ignoring the fringing field effect on the micro-actuator pull-in parameters. And the model of the fringing field capacitances are set up. The relevant data of pull-in phenomenon are obtained in the case of taking into account the fringing field effect. The impact of the change of the micro-actuator parameters on the pull-in voltage and pull-in point is investigated through analyzing the cases. Finally, electrostatic torsion micro-actuator structure is established by ANSYS finite element analysis software. The actual data are obtained by taking into account the fringing effect between the upper and lower plates. Comparing with the data from the solve of model, the accurate of model is showed and the scope of model is given.更多还原