【摘要】 随着对微波单片集成电路(MMIC)愈发严苛的尺寸限制和集成度要求,越来越多的MMIC芯片如限幅器、射频开关等同时具有平衡和非平衡的不同测试焊盘结构,需采用平衡-非平衡混合射频探针进行在片测试,而基于单一平衡或非平衡结构的直通在片校准件无法同时满足混合射频探针的阻抗匹配要求,导致校准精度大幅下降,无法用于MMIC在片测试.为此,本文对采用传统SOLR校准方式的平衡-非平衡混合射频探针测试的校准误差进行了评估计算,并结合带误差修正的OSL二阶去嵌技术和级联矩阵变换技术,提出一种基于平衡-非平衡混合射频探针的MMIC在片测试方法,同时搭建了以矢量网络分析仪、SG与GSG射频探针、微波探针台等组成的在片测试系统来验证方案可行性.通过矢量修正和级联矩阵去嵌,将校准参考平面精确平移至探针尖端面,有效地保证了测试精度,并且结合C#面向对象语言为该测试方案构建了自动测试系统,实现了仪器控制、数据采集、结果修正、数据分析等全自动操作,避免了人为干预的影响,解决了晶圆级测试面临的效率问题.更多还原

【Abstract】 Nowadays, more and more MMICs(e.g., limiters and RF switches) have adopted both balanced and unbalanced test pad structures to address the challenging size restrictions and integration requirements of MMICs, which needs hybrid balanced-unbalanced RF probes for on-wafer test. However, the thru standard based on a single balanced or unbalanced structure cannot meet the impedance matching requirement of the hybrid RF probes at the same time, which leads to significant reduction of the calibration accuracy and fails to satisfy the requirement of MMIC test. Therefore, in this paper, the calibration error of hybrid balanced-unbalanced RF probes based on traditional SOLR calibration method is estimated, and an on-wafer test approach of MMICs based on hybrid balanced-unbalanced RF probes is proposed, which combines OSL second-order de-embedding technique with error correction and matrix transformation technique. Meanwhile, we designed an on-wafer test system which consists of a vector network analyzer and SG and GSG RF probes and so on to validate the solution. After vector error correction and de-embedding, the calibration reference plane can be accurately shifted to the probe tip, which greatly improves the test accuracy. In addition, an automatic test system was built by utilizing the object-oriented C# language to improve the efficiency. The program can realize fully automatic operation with instrument control, data acquisition, results correction, data analysis, and so on, which avoids human interference and solves the test efficiency problems faced with the wafer-scale test.更多还原