【作者】 冷长林；

【导师】 张国雄；

【作者基本信息】 天津大学 ， 测试计量技术及仪器， 2007， 博士

【摘要】 本课题研究了利用激光多普勒技术测量微型振子、马达等微机电器件的瞬时速度、加速度、转速、角加速度等运动参数的方法。论文在前期探索基础上,从测量光路、信号处理电路和信号处理软件等三方面对差动多普勒测量系统进行了改进。采用锁相环电路对信号进行解调,并添加了微机电器件运动方向的辨向电路。通过时频分析,建立了一种能够在时间和频率上同时表示信号的能量或者强度的分布,并在此基础上提取信号中所包含的特征信息的信号处理方法。综合考虑激光的透镜变换、像差和实际需求等因素,采用非球面透镜聚焦,实验获得了微米级测量光斑。搭建了可同时测量微机电器件的面内和离面运动的激光多普勒检测系统,该系统能检测微机电系统的瞬时运动速度、转速、角加速度和位移等运动参数,可用于MEMS器件的高阶振动测量。提出了一种用于微机电系统模态分析的试验方法,该方法可用于确定谐振器结构的模态参数如固有频率、阻尼和振型。设计了微定位系统,同时加入CCD摄像监测光路,使测量光斑能准确定位于被测点。制作了微机电系统驱动控制系统,可驱动不同结构参数的微机电器件。通过对一系列微机电系统谐振器样品、微型马达、加速度校准仪等被测物的成功检测,表明本测量系统可用于微机电系统的运动检测。更多还原

【Abstract】 Micro-electro-mechanical system (MEMS) has been widely used in national defense, high-tech, life science, communication and intelligence technology. The measurements of MEMS have become the bottle neck factor in its development. In this project, a method for measuring dynamic parameters, such as velocity, acceleration, angular velocity, angular acceleration, of the MEMS resonator and the micro motor etc., based on laser Doppler technology is investigated.Based on the early work, the measurement system, including optical diagram, signal processing circuit and data analysis program has been improved. A phase-locked loop is applied to demodulate the signal and a circuit discriminating MEMS motion direction is introduced.A study on the method of laser Doppler signal processing is carried out. Wavelet filters are used and the time-frequency analysis method is applied. A distribution function which shows the signal energy or intensity in time domain and in frequency domain simultaneously is forwarded. The dynamic characteristics of MEMS are extracted from the output of the optical system. By taken care of the actual transformation functions, aberrations of the lenses and practical requirements to the laser spot an optical spot with tens of micrometers diameter is obtained by using aspheric lenses. The methods used here improve the resolution and accuracy of the whole system effectively.A laser Doppler system for measuring the in-plane transient motion and the out-of-plane vibration simultaneously is set up. The dynamic parameters of the MEMS, such as velocity, angular velocity, angular acceleration, displacement, etc., can be measured. High-order vibrations of the MEMS can be also measured by the system. A special modal experimentalion method is introuduced to obtain resonator modal parameters, such as natural frequency, vibration shape, etc.A position micro adjustment system with a CCD camera is designed to place the light spot accurately. In the mean time, a MEMS driving system is developed to drive Micro-electro-mechanical Systems with different parameters.Experiments on measuring the motion characteristics of the MEMS resonators have been conducted. Experimental results show that the system can be used to measure Micro-electro-mechanical System motion.更多还原