【作者】 黄永平；

【导师】 邢忠宝；

【作者基本信息】 中国科学院研究生院（长春光学精密机械与物理研究所） ， 机械制造及其自动化， 2002， 博士

【摘要】 激光加工技术是八十年代后期崛起的一个新兴技术领域，它集光学、精密机械、电、计算机控制和精密测量等多种技术于一体。激光调阻机是激光加工设备在电子工业中的一种应用，用它来高效地生产表面贴装电阻。本文中涉及了激光调阻机的电、计算机控制和测量技术等方面的研究。其设计思路和方法对其它激光加工设备(如表面封装电容激光加工设备等)的实现有一定的借鉴价值。本文围绕激光调阻机的检测与控制系统进行了以下几方面的研究和设计工作。 分析了GSI公司的W724激光调阻机的结构和原理，通过Internet查阅了大量的国内外资料和文献，根据激光调阻机的要求，研究并设计完成了激光调阻机的检测与控制系统。 设计了检测与控制系统主控制板(CPU板)和高精度可编程双电压源板(DVS板)，并提出对现在主控制板设计的升级方案建议。 根据激光调阻机要求对电阻检测精度高的特点，研究了低电阻和高电阻检测时消除检测系统误差的原理。 研究了低电阻检测时产生系统误差的原因，分别用时域和复频域两种方法分析了在低电阻检测时消除附加电阻误差的原理；并通过两组实验数据用数理统计的方法验证了附加电阻误差影响已经被消除的结论。分析了探卡与探针引入的检测误差及提出了解决思路。 研究了高电阻检测时产生系统误差的原因及减少误差的原理；提出了在理想条件下完全消除漏电阻的模型；并对其进行了仿真实验。根据实际情况，提出了对消除漏电阻电路的折衷考虑方案；并提出了为了减少漏电阻的改进连接方式建议。 根据激光调阻机生产高效性的特点，研究了高速刻蚀电阻的原理及实现步骤。 根据电磁兼容理论，分析了干扰的来源，并提出了在DVS板设计时减少干扰的措施。分析了在检测时其它随机误差的来源及减少方法。 根据激光调阻机的控制过程要求，设计并完成检测与控制系统程序(主控制程序)的编写。主控制程序采用了消息驱动机制的编程方法，使 中闪科学阮博 卜兮，位论义：激光调阻机伙这实时人线检测系统的研究程序结构洁晰、实时性强、易于维护和升级。 根据激光调阻机检测与控制系统与上位计算机（工业计算机 r C）的通信要求，设计并完成了串行通信程序的编写。串行通信程序采用了硬件设计中的状态机思想，使通信程序结构清晰、实时性强。提出了一种高效的串行通信协议帧格式，并对其效率进行了分析。更多还原

【Abstract】 Laser Processing Technology is a new technology uprising at the end of eighties of this century, which includes optics, fine mechanics, electronics, computer control and measurement technologies. Laser Resistor Trimming Machine is an application of the laser processing equipments in electronic industry. This dissertation is involved in the studies of electronics, computer control and measurement technology of Laser Resistor Trimming Machine. The designing idea and method of Laser Resistor Trimming Machine is valuable for designing other laser processing equipments. In this dissertation, several studies and designs are made concentrating on the measurement and control system of Laser Resistor Trimming Machine.Analysis of structure and theory of W724 Laser Resistor Trimming Machine of GSI Inc. is made. According to the requirements of Laser Resistor Trimming Machine, the measurement and control system of Laser Resistor Trimming Machine are studied and designed by a review on the development of this domain.The main control board (central process unit board, CPU board) of measurement and control system is designed, and high accuracy programmable dual voltage source board (DVS board) is designed. Improving suggestions of the CPU board are brought forward.According to the properties of high accuracy demand for resistor measurement of Laser Resistor Trimming Machine, the theory of lessening or removing error of low resistance and high resistance measurement is studied.The error reasons of low resistance measurement are studied, the theory of removing line resistance error proves to be right with time-domain analysis method and frequency-domain analysis method, and the results proved to be true by the experiment datum with the statistics method.The error reasons of high resistance measurement are studied, and the theory removing line resistance error proves to be right. The model removing the leak resistor circuit is brought forward, and simulationexperiment about the model is made, and the result proves to be true. The compromise scenario is brought forward as practice condition. Improving suggestion of lessening the leak resistance is brought forward.According to need of the high efficient character of Laser Resistor Trimming Machine, the theory of high efficiency is studied, and the implementation steps are given.According the EMC theory, the sources of interference are analyzed, and the methods lessening the interference are brought forward.According to the need of control process of the Laser Resistor Trimming Machine, the program measuring and controlling the system is designed. The program is designed with message driven mechanism like Windows program, it makes the program be simple in structure, real-time, easy in maintenance, and easy in upgrade.As the need of communication with the superior computer, the serial communication program is designed. The thinking of state machine in hardware design is adopted in the serial communication program; it makes the serial communication program be simple in structure, real-time. A high efficient protocol of serial communication is brought forward, and proved to be efficient.更多还原