【作者】 陈辉；

【导师】 孙振东；

【作者基本信息】 华南理工大学 ， 控制理论与控制工程， 2014， 博士

【摘要】 MEMS微镜在光开关、高清晰显示、光学相干断层扫描、数字投影和条形码扫描等领域获得广泛应用，引起了国际学术界和工业界的关注。光开关应用中要求MEMS微镜具有良好的暂态响应和扫描定位精度，成像应用中需要MEMS微镜跟踪给定轨迹(正弦或三角波轨迹)进行扫描。考虑到基于MEMS微镜应用中的性能要求，本文基于滑模控制理论设计控制算法并应用于MEMS扭转微镜，主要内容包括以下几个方面：(1)将一阶滑模控制算法和二阶Twsiting控制算法应用于带侧面电极的2D静电驱动MEMS扭转微镜，目的是提高系统的暂态响应和定位精度。通过MATLAB仿真和基于可编程门阵列(FPGA)硬件的实验验证所提出算法的有效性。仿真和实验结果表明，与开环控制相比,闭环控制系统具有较好的暂态响应和定位精度。与一阶滑模控制相比，二阶Twsiting控制下的系统具有较好的定位精度。(2)针对带侧面电极2D静电驱动MEMS扭转微镜设计基于积分滑模面的二阶滑模控制算法，该算法由等价控制和切换控制两部分组成。采用Lyapunov理论证明系统的稳定性，通过定点控制、跟踪控制和扰动实验来验证闭环系统的性能。实验结果表明二阶积分滑模控制能够改善系统暂态响应,提高定位和跟踪扫描的精度。(3)将积分滑模控制算法应用于电磁驱动MEMS扭转微镜，建立基于电磁驱动MEMS扭转微镜的激光扫描成像系统,实现闭环控制下的1D扫描成像。实验结果表明，与传统开环控制和PID控制相比，积分滑模控制下的系统具有较好的暂态响应和定位精度，而且能够精确跟踪给定正弦和三角波轨迹进行扫描。更多还原

【Abstract】 MEMS micromirrors have been applied in many applications such as optical switches,high definition display, optical coherence tomography, digital light projector and barcodescanner, MEMS micromirrors have attracted great attention in the academic and industrialfields. Enhanced transient performance and high positioning accuracy are required in theapplication of MEMS micromirror-based optical switches. The MEMS micromirror isrequired to precisely follow the sine or triangular trajectories for imagingapplications.Considering the requirements in the MEMS micromirror-based applications, theobjective of this thesis is to design and implement control strategies for MEMS micromirrorbased on sliding mode control (SMC) theory,the main contents are listed as follows:(1) A first-order SMC scheme and a second-order Twisting algorithm are implementedfor a2D electrostatic MEMS micromirror with sidewall electrodes. The objective is toimprove the transient and positioning performance of the system. The effectiveness of theproposed schemes is verified through MATLAB simulation and experiment based onfield-programmable gate array (FPGA) hardware. Compared with open-loop control system,the simulation and experimental results show that the closed-loop control system with theproposed schemes has better transient response and positioning performance. Compared withfirst-order SMC, the better positioning performance is achieved by using Twisting control.(2) A second-order sliding mode control scheme with integral sliding surface isdesigned and implemented for a2D electrostatic MEMS torsinal micromirror with sidewallelectrodes. The proposed2-SMC is comprised of two parts, equivalent control and switchingcontrol. The stability of the closed-loop control system is guaranteed using Lyapunov stabilitytheory. The performance of the closed-loop control system is verified though experimentsincluding set-point control, tracking control and disturbance rejection test. The experimentalresults show that the transient response, positioning and tracking performance are improvedwith the proposed scheme.(3) An integral sliding mode control is designed and implemented for a magneticMEMS micromirror. A magnetic micromirror-based laser scanning system is developed,1Dimage was obtained under the closed-loop control system. The experimental resultsdemonstrate that the proposed scheme can significantly improve the transient response ascompared to traditional open-loop control and PID control. The closed-loop controlledmagnetic MEMS micromirror follows the given sine and triangle trajectories precisely withthe proposed scheme.更多还原