【作者】 李正刚；

【导师】 吴一辉；

【作者基本信息】 中国科学院研究生院（长春光学精密机械与物理研究所） ， 机械制造及其自动化， 2010， 博士

【摘要】 光谱仪器是光谱与光谱分析学基本的分析工具,光谱仪的微小型化得益于许多其他相关技术的进步,特别是80年代末期微电子以及与之相关的MEMS(micro-electro-mechanical-system)工艺技术的发展。但是与传统的光栅式光谱仪相比,由于色散距离变短,仪器空间更加紧凑,仪器的分辨率、灵敏度、信噪比等性能将更多地依赖光探测器件及其数据采集和信号处理部分。本论文在对微小型光栅光谱仪的光学结构设计和讨论的基础上,着重研究了:(1)交叉光路Czerny-Turner小型光谱仪光学系统基本参数的选择和评价,特别是采用MEMS工艺制作硅狭缝的方法及其性能特征;(2)研究了光谱探测通用驱动系统的设计方法,以相同的硬件同时完成三种型号CCD探测器的驱动,精简了电路设计,同时实现了TCD1304AP型号探测器10us～3sec的积分时间调节范围;(3)在软件系统设计部分,不仅完成了对光谱仪的全面控制和常规光谱测量功能,还以两种接口方式实现了二次开发动态链接库,使整体系统具有更高的实用性和灵活性;(4)微小型光谱仪软件去噪方法,在分析、对比了FFT等多种去噪方法的基础上,提出并实现了小波域firm阈值滤波去噪方法,实验证明这种方法在保留原始信号的同时达到了理想的去噪效果,节省采集时间4-5倍,得到了较好的噪音和平滑效果,再除去大部分噪音的同时保证了信号峰值的准确性;(5)提出了采用统一积分时间数据测量提高探测器的动态范围的方法。使用该方法可以不用考虑被测物反应前后浓度变化而产生积分时间选择问题,只需要在软件自动选定的最佳积分时间下采集当前数据即可,不同积分时间下的数据根据转化公式转化到统一的积分时间数据上进行吸光度计算。论文还讨论了不同类型杂散光对最后测试结果产生的不同影响,着重分析了基于微硅狭缝的紫外-可见光谱仪关键部件微狭缝缺陷,引起杂散光主要因素为刀口过厚和狭缝边缘的直线度等,同时通过双重组合滤光片法,成功实现了平衡各谱段能量占有率的目的。更多还原

【Abstract】 Spectrometers are the basic analysis instruments of optical spectroscope and spectral analysis,especially in the late 80s and MEMS (micro-electro-mechanical -system) technology development. But with a traditional grating spectrometer compared to the dispersion distance as shorter, more compact space equipment, apparatus, resolution, sensitivity, signal to noise ratio performance will rely more on detector,data acquisition and signal processing.This paper on Miniature spectrometer for small grating structure design and the basis for discussion, and focused on:(1) Czerny-Turner spectrometer optical system selection and evaluation of basic parameters, especially the production of silicon using MEMS technology and performance characteristics of slot means;(2) Spectral detection of common drive system design approach to the same hardware simultaneously drive three models CCD detector, maximum simplified circuit design, achieved TCD1304AP type detector integration time 10us ~ 3sec adjustment range, to ensure the system can meet the needs of the majority of practical applications;(3) Part of the software system design not only completed the total control of spectrometer and conventional spectral measurements, also in two interface modes to achieve the secondary development of the dynamic link library, implemented software system extensions, and the overall system has greater practicality and flexibility; (4) Miniature spectrometer software denoising in the analysis, comparison of the FFT and other denoising based on wavelet domain is proposed and implemented a firm threshold filtering denoising method, experimental results show this method to preserve the original signal the same time to achieve the ideal denoising effect, to save acquisition time 4-5 times, get a better effect of the noise and smooth, then remove most of the noise peak at the same time guarantee the accuracy of the signal;(5) Proposed a unified data integration time measurements to improve the dynamic range of detector method. Using this method can not consider changes in the concentration of measured object response generated after selection of integration time, the software automatically selected only the best integration time under the current data can be collected, the data under different integration time conversion formula based transformation to unified data integration time on absorbance calculations.The paper also discusses the different types of stray light on the final test results to the different effects, with emphasis on micro silicon slit of the UV - visible spectrometer defects, the main factors causing stray light cut-off thick and slit edge straightness, etc., and combinations through the dual filter method, successfully achieved a balance of all share the purpose of the energy spectrum.更多还原