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干式真空泵结构设计及其转子平衡分析与仿真

Strctural Design of Dry-Type Vacuumpump and Its Rotor Balance Analysis and Simulation

【作者】 于存荣

【导师】 李端玲;

【作者基本信息】 北京邮电大学 , 机械电子工程, 2010, 硕士

【摘要】 干式真空泵广泛应用于航天、半导体、制药、化工等行业。随着我国工业化水平的不断提高,航天、半导体等行业对真空泵的需求也逐步提高。但是目前常用的干式真空泵体积大,质量重,而且转子的平衡性不理想。鉴于此,本论文对一种爪式真空泵进行了整体结构设计,并对核心部件——转子进行了平衡分析。首先,论文阐述了真空、真空泵及干式真空泵的概念以及爪式真空泵的组成和工作原理,给出了国内外有关真空泵研究的一些现状以及发展趋势。其次,提出了整体设计方法,完成了真空泵的整体结构设计。它主要包括泵壳的设计、转子型线的设计和主动轴的设计校核。,.泵壳的设计主要是考虑尽量减少重量和保证壳体的壁厚。转子型线是爪型转子主要的工作曲线,本文将它分为六段曲线,分别对每一段曲线的设计做了说明。第三,进行了真空泵转子的平衡分析。转子平衡主要分为静平衡和动平衡两类。静平衡主要研究了单个转子,由于转子形状不规则,在计算不平衡量时采用了割补的思想,将转子分割成五部分,每部分的都为规则形状,计算得出各部分产生的不平衡量。动平衡是针对三个转子的情况,将每个转子的不平衡量投影到两个不同的平衡面上,这两个平衡面选在轴承附近。两个平衡面上计算得出总不平衡量,然后在适当的位置加上一个配重。与以往通过在转子上加配重来平衡的方法不同,本文通过计算不平衡量,在转子本身特定位置去掉特定质量,使转子达到平衡。通过这种方法的改进和优化,真空泵转子的加工和装配时间大大减小。最后利用Pro/Engineer和ADAMS仿真软件对计算结果进行仿真。仿真结果验证了设计参数的可行性,为该真空泵产品化提供了设计基础。

【Abstract】 Dry-type vacuum pump(VP) is widely used in aerospace, semiconductor, pharmacy, chemical and other fields. With the improvement of modern industrialization, the demand for VP is gradually increased, especially in the aerospace and semiconductor field. However, at present the VP is of huge volume and high weight, and the rotor is of bad balance. In view of this, an overall structural design on the claw-type VP is advanced. The balance of rotor, which is the core of the VP, is analysed.First, the concepts of vacuum, VP and dry-type VP together with the composition and operation principle of claw-type VP are expatiated. What is more, it is given that the current situation of research and the trend of development concerning VP Domestic and Abroad.Second, an overall design method is advanced, and the overall structural design of VP is finished. The overall structural design mainly includes the design of pump shells, the design of rotor type line and design and check of driving shaft. The design of pump shells must be mainly guaranteed lessening the weight and the wall thickness. As the main working curve line, the type line of rotor is divided into six phases. Then the design of each curve line is given the clarification respectively.Third, the balance analysis of VP rotor is analysed. The balance of VP rotor can be classified into two types, namely static balance and dynamic balance. The static balance mainly researches single rotor. Because the shapes of rotor is irregular, when the imbalance is calculated, cession and supplement method is used. The rotor is divided into five parts in this method and each part with a regular shape, is calculated respectively. The dynamic balance is used to analyse three rotors. In this method, the quantity of imbalance of every rotor is shadowed into different balance surface, where the two balance surface is near the bearing. The total imbalance quantity on the two surfaces is calculated. Then, given weight is added at demand position. This method is different from previous methods which adds weight on rotors to achieve balance. A certain quality on rotors’certain place is cutted to achieve balance in this paper Through the amelioration and optimization of this method, VP rotors’processing and assemble time is decreased effectively.Finally, the Pro/Engineer Software and ADMAS Software is used to simulate. the designed parameter is verified to be viable. It provides a design basis for this VP products.

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