【作者】 蒋攀；

【导师】 黄佳木；

【作者基本信息】 重庆大学 ， 材料学， 2010， 硕士

【摘要】 建筑门窗的能耗约占到建筑物全部热损失的50%,因此减少玻璃窗的热损失对建筑节能具有非常重要的意义。由于低辐射玻璃比较高的可见光透过率,能保证室内有良好的采光,其对远红外也有很好的反射率,有很的节能效果,可以有效地减少采暖和空调费用,因此低辐射玻璃得到了越来越广泛的应用。银系低辐射玻璃通常将TiO2、SnO2等氧化物作为介质膜,所以很难避免Ag膜被氧化,且不能对Ag起到好的保护作用。由于氮化钛薄膜具有良好的可见光透过率、化学稳定性和一定的远红外反射率。本实验将其用作低辐射膜的介质膜,研究其光学性能和耐腐蚀性能。本课题以银靶和钛靶为靶材,N2为反应气体,Ar气为工作气体。采用射频磁控溅射法在玻璃基片上沉积TiNx/Ag/TiNx薄膜。运用X射线衍射仪(XRD)、X射线光电子能谱(XPS)、场发射描扫显微镜(SEM)、四探针电阻仪、紫外/可见/近红外分光光度计、台阶仪、傅里叶红外光谱仪等手段对制备的薄膜样品进行测试和分析。研究表明,氮化钛薄膜呈非晶态,外层TiNx薄膜表面存在着较多的Ti-O键,对低辐射膜的可见光透过率有提高作用。低辐射膜的可见光透过率随着Ag膜的增厚先增加后降低,随着氮气流量的增加而增加,随着TiNx薄膜的溅射功率的增加先增加后降低;随着内层和外层TiNx薄膜厚度的增加,低辐射膜的透射峰发生红移但都对峰值影响不大。随着厚度的增加,外层TiNx薄膜越来越致密。当厚度达到32nm时,对H2S气体、NaOH溶液和NaCl溶液的腐蚀可以起到较好的保护作用,但本课题研究的低辐射膜耐HCl溶液腐蚀的能力还有待进一步提高。结构为16nmTiNx /16nmAg/32nmTiNx的低辐射膜有较高的可见光透过率,对光谱具有明显的选择性,同时具有优良的耐腐蚀性能。可见光透过率达到85%,近红外反射率可达到92%,辐射率为0.093。更多还原

【Abstract】 The energy loss from door and window account for about 50% of total energy loss of buildings, so it’s very important to reduce the energy loss from door and windows for building energy saving. The Low-e glass have very high visible transmittance and high far-infrared (IR) reflectance, so the building have good lighting and very good energy saving effect, the Low-e glass wildly used for it can save the heating and conditioning expense.Usually, TiO2、SnO2 films used as dielectric films of Low-e glass., but the Ag film should be oxidized. Titanium nitrides have very high visual transmittance、chemical properties and far-infrared reflectivity。Due to its character, this topic used it as the dielectric film of coatings. Study the optical and corrosion-resistance properties.In this work, all films have been prepared by r.f. magnetron sputtering, using N2 as the reaction gas,using Ar as the working gas. The films were characterized by means of XRD, SEM, XPS, UV-VIS-NIR spectroscopy, step profiler , fourier infrared spectrometer and so on.The results indicate that TiNx thin films are amorphous, on the surface of which exists a lot of Ti-O bonds, bears responsibility for improving the visual transmittance of multilayer film. The transmittance of films, firstly increase and then decrease with increasing of thickness of Ag thin film, is improved with the increase of nitrogen flow rate, is firstly increase and then decrease with the increase of power of TiNx thin films. The transmission peak of Low-e thin film shows red shift with the increase of thickness of insider or outsider TiNx thin films. With the increase of thickness, outsider TiNx thin films become more and moredense. While the thickness of TiNx film comes to 32nm, the Low-e glass has good corrosion-resistance property, but the acid-resistant should be improved.While the texture is TiNx(8nm)/Ag(16nm)/TiNx(16nm), the visible transmittance of multilayer film reach up to 85%,the far-infrared reflectance is up to 92%、the emissivity is 0.093 , the Low-e films presents very good corrosion-resistance and optical property.更多还原