【作者】 王二伟；

【导师】 李金环；

【作者基本信息】 东北师范大学 ， 光学， 2010， 硕士

【摘要】 在制造高质量产品和高效率生产过程中,精密测量技术起到了很大的作用,而且其重要性与日俱增。光学测量技术是一种非接触测量,与传统的接触式测量技术相比,非接触式测量具有精度高、信噪比高、动态响应快、线性好、量程范围大和非接触等优点。用干涉的方法比较两个光滑表面之间的微小差异或错位是我们所熟悉的。例如如果在迈克尔逊干涉仪中的两臂的反射镜不完全垂直,则在视场中将出现平行的干涉条纹。于此同理,用马赫—曾德尔干涉仪可以测量一个加工出来的光滑球面与另一个标准光滑球面之间的微小差异。但是上述方法中存在着两个缺点。首先,比较是在两个表面之间进行的,如果一个表面后来的形位相对于原来的形位发生了微小差异,则上述方法对此无能为力。其次,被比较的两个表面都必须是光滑的。本文中我们介绍了双波长全息干涉术,这种方法可以克服以上两个缺点。因为比较的对象是同一表面的先后两个状态,而在表面的形位发生变化时其同一局部的细微结构基本保持不变,所以这种方法不必限定光滑表面,而适用于粗糙的漫射表面。同时我们运用双波长全息法测量物体表面形貌,把一个凸凹不平的表面的高度分布情况借助干涉条纹显现出来,通过理论分析和实验验证,这是一种具有纳米准确度的可行测量方法。更多还原

【Abstract】 In the manufacture of high-quality products and efficient production processes, precision measurement technology plays a significant role, and it is growing importance. Optical measurement technique is a non-contact measurement. It has a lot of advantages over traditional contact measurement technique, such as high accuracy, high signal to noise ratio, fast dynamic response, good linearity, large measuring range, non-contact and so on. Comparing the small differences or dislocation between two smooth surface with the interference method is familiarFor example, if the Michelson interferometer’s mirrors in the arms are not completely vertical, parallel interference fringes will appear in the field .Also using Mach-Zehnder interferometer the small difference between one produced smooth sphere and another standard smooth spherical can measure. However, there are two shortcomings in these methods. First, because the comparison is conducted between the two surfaces, relative to the original surface, if the shape and position occurred minor differences, the above method could not work. Second the two surfaces being compared must be smooth.In this paper we introduce a two-wavelength holographic interferometry, and this method can overcome these two shortcomings. Because the objects of comparison are two states of the same surface,and when the surface changes occurred, fine structure of its essentially unchanged at the same local. This method don’t limit the smooth surface and it applies to rough diffuse surface too. We use two-wavelength holographic to measure the surface of objects, and show the contour distribution of the surface with interference fringes. Through theoretical analysis and experimental testimony. This is a kind of method with nanometer precision.更多还原