【作者】 郑艳彬；

【导师】 姜志刚；

【作者基本信息】 吉林大学 ， 凝聚态物理， 2010， 硕士

【摘要】 本文采用热阴极直流等离子体化学气相沉积（DC-PCVD）方法,以CH₄+H₂+CO₂为反应气体,合成出了高品质、生长速率快的金刚石厚膜。研究了CO₂流量对金刚石膜生长的影响,包括表面形貌、晶粒取向、膜的质量、应力和生长速率变化等。研制了一种CVD金刚石石材刻刀,适合于花岗岩及硬质石材上小号字的雕刻。研究了切削速度、进给量、切削深度等因素对刻刀寿命的影响。分析了刻刀的磨损机理和磨损过程。更多还原

【Abstract】 Diamond is an excellent material and has high application value. Natural diamond isexpensive that restricts its application. High quality CVD diamond has approached naturaldiamond in some physical and chemical properties. Because of its large-area flaky shape, CVDdiamond film is endowed more advantage in application. Research on diamond film’s growthproperties is a hot problem. Also, more and more researchers focus on diamond film’sapplication these years.In this paper, we synthesized diamond films on Mo substrate with hot cathode DC plasmachemical vapor deposition method. CH₄,H₂ and CO₂ were used as gas source and their flowswere 8sccm, 200sccm and 0-2sccm, respectively. SEM、XRD and Raman were used tocharacteristic films’morphology, structure and quality. The results indicate: with the increase ofCO₂ flow, the film became dense; Without CO₂addition, the film had a （100） orientation. WhenCO₂ flow up to 2sccm, （111） orientation was dominating. In the middle, （110） orientation wasthe main film orientation. XRD verified the structure’s differences of all samples;Accompanying the increase of CO₂flow （0.5-2sccm）, the I₁₁₁/ I₂₂₀ ratio increased from 0.02 to5.26, that exceeded natural diamond standard power’s I₁₁₁/ I₂₂₀ ratio （3.7）; Without CO₂additionor CO₂flow is 0.5sccm, the film had a bad quality because the graphite existed in the film. Thegraphite peak that aligned at 1580cm-1 in Raman spectra disappeared when CO₂ flow exceed0.5sccm. As was also seen, the compressive stress changed to tensile stress when CO₂flow is0.89sccm and the growth rate decreased with the addition of CO₂. High quality diamond films’growth rate can reach 12um/h.Additional, we designed and manufactured a kind of CVD diamond graver that can be usedcarving small words on the surface of granite. We design orthogonal experiment. The varianceanalysis of experimental results indicating: cutting speed had a very significant influence ongraver life. Feed rate had a significant influence on graver life except depth of cut. Multipleregression analysis is made to get experienced life equation. The main wear mechanism is abrasive wear. We put forward wear process thorough observing wear morphologies.更多还原