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IC制造装备中专用机器人运动学分析与设计

Kinematic Analysis and Design of a Parallel Robot for Wafer Transfer

【作者】 罗发扬

【导师】 倪雁冰;

【作者基本信息】 天津大学 , 机械制造及其自动化, 2009, 硕士

【摘要】 本文以一种可实现整周回转二平动自由度并联机构为对象,研究了机构的运动学建模、尺度综合、伺服电机参数预估、轨迹规划等关键技术,为硅片传输机械手样机的设计和建造奠定了基础,论文取得如下主要研究成果:运用矢量法原理,建立了并联机械的闭环矢量方程,由此推导出其位置正逆解分析模型,及速度、加速度模型。在此基础上考虑机构的速度雅克比矩阵的条件数、末端运动分辨率等因素,提出了一种综合评价指标并以其在工作空间内的均值和波动幅度值最小为优化目标,对机构进行了尺度综合,为机构机械设计奠定了基础。利用虚功原理推导了机构刚体逆动力学模型,借助奇异值分解原理,推导了关节变量上界与单位操作变量间的映射关系,在此基础上预估了机械手伺服进给电机参数。研究了一种以机械手的运行时间和搬运加加速度为综合优化目标的轨迹规划方法。采用分段多项式确定几何路径后,以关节转矩、关节转速为系统约束,同时分段设置路径加速度、加加速度上限等工作约束,利用三次参数样条进行了轨迹规划。上述研究成果为后续样机开发奠定了基础,对硅片传输机器人的设计开发具有指导作用。

【Abstract】 This dissertation deals with the kinematic analysis, dimensional synthesis, servomotor parameters estimation and trajectory planning of a whole rotative 2-DOF planar parallel robot which is developed to transfer wafer in IC industry. As preparation for the prototype development, the following works have been completed.Based on the closed-loop constrained equation of the proposed robot, the inverse and forward kinematic analytical model is founded. Under constrains of free-singularity and the minimum pressure angle, an index, which is composed of the conditioning number of Jacobian matrix, velocity and motion resolution, is considered as the evaluation criterion. And a new index which is proposed by considering both the mean value and fluctuation of the pre-mentioned index in whole workspace is used to optimally design the dimension parameters. It is testified that the results confirm the integration kinematic behavior.With the aid of the principle of virtual work, the dynamic model of the robot has been formulated. An approach to estimate the servomotor parameters is proposed using the singular value decomposition technique, resulting in the mapping function between the maximum value of joint variables and the unit operation variables. The servomotor parameters including the moment of inertia, the maximum speed, torque, and power are estimated for the wafer robot.An approach for trajectory planning which takes the operation time and path jerk as the integration optimal object is proposed. After the piecewise-polynomial form of the geometric path is determined, the maximum joint velocity and torque constrains are applied and the upper bounds of the path velocity, acceleration and jerk are set, then the trajectory is planned in workplace via the three order parameterized spline. The trajectory planned by this approach has the advantages of short operation time and low jerk.The above results are fundamental for the following prototype development.

  • 【网络出版投稿人】 天津大学
  • 【网络出版年期】2011年 S2期
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