【作者】 刘冬；

【导师】 张鹤鸣； 高勇；

【作者基本信息】 西安电子科技大学 ， 软件工程， 2010， 硕士

【摘要】 电容式传感器是将被测量的非电量变化转换为电容变化量的一类传感器。集成电路和微电子机械系统设计与加工技术的迅猛发展,使得MEMS传感器的研究和应用得到了极大的发展。MEMS电容式传感器作为微电子机械系统研究和制造领域重要的分支,具有体积小、易集成、低成本、可靠性高等优点,广泛应用于航空航天、工业自动化、汽车安全气囊等领域。本文分析了国内外传感器的典型形式,比较了各种MEMS电容测量电路的优缺点,针对MEMS电容式加速度传感器输出电容变化量小的特点,设计出了基于开关电容技术的电容检测电路系统及检测系统所需要的带隙基准电压源,自偏置基准电流源,振荡器等电路模块,并且对上述电路模块进行了优化。然后对各个模块和系统电路进行了仿真、修改、优化。证明了MEMS电容式加速度传感器检测电路系统的正确性和可行性。最后,介绍了Cadence版图设计和验证工具,并给出了MEMS电容式加速度传感器检测电路的版图设计和验证过程。更多还原

【Abstract】 A capacitive sensor is the sensor that includes a variable capacitor sensor which varies its capacitance with changes in an environmental parameter. Along with the fast development of the design and manufacturing level of MEMS, the research and application of the MEMS sensor are greatly accelerated. As an important branch of the intellectualized microcomputer electrical system series, MEMS sensor has so many advantages, such as smaller in volume,reliability. At present, acceleration sensors are widely used in the field of navigation and aerospace, industry auto-mation, car airbag control and so on.Typical signal processing circuits of micro capacitive sensors were analyzed in this study, and the characteristics of these circuits were compared.Because of the minimal output capacitor change of MEMS capacitive accelerometer, detecting circuit of MEMS capacitance based on the switched capacitor technology was selected. The bandgap voltage reference,self-biased current reference and relaxation oscillator modules were designed, and these basic units in analog integrated circuits were analyzed. Cadence layout design and validate tools were introduced and the layout design and validate process of the circuit was presented.更多还原