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数字散斑干涉术测物面形变

Surface Deformation Measurement Based on Digital Speckle Pattern Interferometry

【作者】 逄浩君

【导师】 王文生;

【作者基本信息】 长春理工大学 , 光学工程, 2010, 硕士

【摘要】 本文研究了用数字散斑干涉术(DSPI)测量物面形变。DSPI综合了散斑干涉技术、精密测量技术、计算机图像处理技术,测量误差小、精度高,可用于检测微米量级的形变。基于DSPI原理,设计了由泰曼-格林系统、马赫-曾德系统及微机控制的实时散斑系统组成的三种实验装置,并用这三种实验装置进行粗糙物体表面的形变测量。为实现散斑干涉术的数字化,本文利用CCD接收散斑干涉图并将其输入计算机进行数字图像处理。根据散斑干涉图高噪声的特点,采用相减模式得到包含物体形变信息的数字散斑相关条纹,计算出物体的形变量。最后,本文在研究了空域和频域中各种去噪算法去噪能力的基础上,采用多种Matlab滤波程序,有效的消除了相关条纹中颗粒性噪声的影响,以改善相关条纹的对比度和图像的清晰度。

【Abstract】 Digital speckle pattern interferometry (DSPI) for surface deformation measurement is studied in this paper. Digital speckle pattern interferometry is combined with speckle interference technology, precision testing technology and computer image processing technology. It has smaller error and higher accuracy, so it can be used in measuring micron dimension deformation. we design three kinds of optical devices based on principle of DSPI, they are composed of Twyman-Green、Mach-Zehnder and a computer-controlled real-time speckle interference system and used in rough surface deformation measurement. In order to achieve the digital speckle pattern interferometry, the device receives the interference fringes by CCD and input the fringes to the computer in order to carry on digital image processing. According to the characteristic of the speckle pattern and it is high noise, we present subtraction method to process image, and the correlative fringe pattern include object’s deformation information is obtained. Then, we can count the deformation by the correlative fringe. At last, this paper applies filter program wrote by Matlab, eliminates the effects of digital speckle interference correlative fringe pattern effectively which caused by pellet noise, improves the contrast of fringe and increases the definition of image, based on the study of the de-noising ability of all kinds de-noising algorithm in spatial domain and frequency-domain.

  • 【分类号】O436.1
  • 【被引频次】2
  • 【下载频次】220
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