【作者】 赵士恒；

【导师】 董树荣；

【作者基本信息】 浙江大学 ， 微电子学与固体电子学， 2010， 硕士

【摘要】 随着半导体工艺和射频通信技术的发展,传统的传感器正逐步实现微型化、智能化、信息化和网络化。薄膜体声波谐振器(FBAR)因其优越的特性,低廉的价格,可与半导体工艺兼容的等优势,显示出广阔的应用前景。实现FBAR同CMOS电路的单芯片集成,并应用于无线传感网中成为一大趋势。本论文围绕FBAR无线传感器单芯片集成技术展开讨论,主要针对FBAR的集成制备工艺及建模、FBAR无线传感应用系统设计、质量传感特性及传感信息处理芯片等三部分内容展开探讨,为进一步研究FBAR无线传感器的集成做出有意义的探索。论文的主要工作及创新点包括:1.优化FBAR设计制备流程,提出了一种CMOS电路钝化层上集成制备FBAR的新结构及其工艺,设计、流片并测试了几种典型结构的纵波及剪切波FBAR。论文分析了FBAR的寄生效应,提出一种新的加入寄生参数的PMBVD等效电路模型,使用该模型可以有效提高FBAR仿真精度,同时可以根据该模型优化设计FBAR的PAD结构等。2.对FBAR传感特性进行了测试和分析,在此基础上提出了一种双路计数差频方法采集处理FBAR质量传感信息的方法。该方法简单可靠且精度高,理论上可以达到该FBAR可检测微小质量的最小极限。设计、流片并测试了该FBAR微质量传感信息采集处理的芯片,该芯片前级采用低功耗的源耦合逻辑分频器对射频信号进行预分频。3.设计FBAR无线传感器单元的系统架构,并根据系统应用无线通信链路情况设计了基于CMOS工艺的868MHz、433MHz经典E类功率放大器。提出一种低功耗、低噪声的电流重利用交叉耦合的FBAR振荡器结构,并设计了温度补偿电路。更多还原

【Abstract】 As semiconductor technology and RF communication technology continue to progress, traditional sensors are becoming more and more miniaturized, intelligentized, informationalized and cyberized step by step. Because of its high performance, low price, and good compatibility with standard CMOS process, FBAR has a large application potential. Integration of FBAR in CMOS process as well as application of FBAR in Wireless Sensor Networks has been a strong tendency. This paper mainly focuses on the issues of integration technology of FBAR wireless sensor. It includes 3 parts: FBAR’s fabrication, integration process and modeling; FBAR wireless sensor application system design; tiny-mass sensor characteristics and sensing information processing chip. This work is meaningful for further research on integration of FBAR wireless sensor.Major work and innovation points of this dissertation are listed as follows:1. Optimization is made for FBAR design and fabrication process. A new structure and process that fabricate FBAR on the surface of CMOS circuit’s passive layer is proposed. Several typical longitudinal-wave and shear-wave FBARs are designed, fabricated and tested. The paper analyzes the parasitics of FBAR, and put forward a new equivalent circuit model PMBVD which takes parasitics into account. This model could be used to improve the simulation accuracy of FBAR as well as to optimize the structure of FBAR’s PADs.2. An in-depth analysis is made on FBAR tiny-mass sensor characteristics. Based on the analysis, we propose a dual-channel frequency difference counting method to acquire and process the information from FBAR tiny-mass sensor. This method is simple, reliable and accurate. Theoretically, it could detect the smallest mass of the FBAR’s ability. An FBAR tiny-mass sensor signal acquisition and processing chip is designed, fabricated, and tested. Low-power source-coupled logic dividers are introduced to reduce the frequency of RF signals from Giga Hertz to a frequency that CMOS circuit could deal with.3. System architecture of FBAR wireless sensor unit is advanced. According to the analysis on this wireless communication links, we designed two CMOS Class E power amplifiers whose frequencies are 868MHz, 433MHz respectively. A low-power, low-noise FBAR oscillator with current-reuse cross-coupled configuration is presented, and temprature-compensation circuit is designed for FBAR oscillator.更多还原