【作者】 朱黎明；

【导师】 谭久彬；

【作者基本信息】 哈尔滨工业大学 ， 仪器科学与技术， 2009， 硕士

【摘要】 随着光学技术的不断发展,非球面光学元件以其优越的光学特性被应用于多个领域,然而非球面光学元件在检测方面的困难制约了其广泛应用。子孔径拼接干涉检测技术,因具有拓展干涉仪的横向和纵向动态范围,能够对非球面进行低成本、高分辨率检测的优点而成为一个重要的研究课题。本文针对子孔径拼接干涉检测非球面开展了以下研究。首先介绍了子孔径拼接干涉检测的基本原理,对各种子孔径形状和各种拼接模式进行了比较,在此基础上介绍了拼接算法的基本原理,包含两两拼接算法、全局误差均化算法和局部误差均化算法。其次完成了非球面子孔径拼接检测系统总体方案的设计,设计了包含非球面合成检测机构、大口径近平面非球面检测机构和小口径深度凹非球面检测机构的三种检测机构,进而设计了非球面检测流程,解决了子孔径划分模式的优化和检测机构的运动规划问题。讨论了非球面检测系统的误差修正,分析了标准球面波前误差、机构运动调整误差和成像畸变误差对非球面检测的影响并给出了修正方法。然后研究了子孔径拼接检测算法,对包括子孔径波面拟合和子孔径定位变换的拼接算法预处理方法进行了讨论,提出了基于调整误差分离模型的全孔径拼接优化算法,并用Matlab编制了包含多个模块的拼接算法程序。最后,对平面子孔径拼接检测和非球面子孔径拼接检测进行了实验验证,测量结果PV值的误差小于十分之波长,验证了拼接算法和拼接程序的有效性,并对检测误差进行了分析。更多还原

【Abstract】 With the continuous development of optical technology, aspheric optical elements are used in many areas for its excellent optical properties, but the wider use of this technology was constrained by the difficulties in testing. Sub-aperture stitching, as it can be used to expand the horizontal and vertical dynamic range of a interferometer, can test aspheric optical elements with low-cost and high-resolution, has become an important research topic. This thesis studies these aspects aims at aspheric surfaces testing with sub-aperture stitching testing technique as follows:Firstly, basic principles of sub-aperture stitching have been investigated. Then we compare various sub-aperture shapes and a variety of sub-aperture stitching patterns. On this basis we introduce the basic principles of several stitching algorithms, include double sub-aperture stitching algorithm, global optimization algorithm and local optimization algorithm. Secondly we design overall plan of aspheric surfaces testing system with sub-aperture stitching method. Design three kinds of testing mechanisms, which are combined testing mechanism for aspheric surfaces, testing mechanism for large-diameter near-plane aspheric surfaces and testing mechanism for small-caliber deep concave aspheric surfaces. Put forward a process program for the measurement of non-spherical, resolve the optimization of sub-aperture partition, and the motion planning problem of testing organizations. We discuss about how to remove errors in aspheric surfaces testing system, make an assay of the inaccuracy of standard spherical wave-fronts, the inaccuracy of movement and adjustment of testing organizations, the inaccuracy of image distortion, which can influence the detection of non-spherical, and give compensation methods in addition. Make a study of algorithms of sub-aperture stitching, conduct a discussion of stitching algorithm pretreatment methods which includes sub-apertures fitting and sub-aperture orientation transformation. According to these researches, we write a stitching algorithm program with Matlab.In the end, sub-aperture stitching tests are performed with a planar mirror and an aspheric mirror respectively, the PV value of test result has reached one tenth wavelength, which verifies the validity of the stitching algorithm and program. Besides, test errors also have been analyzed.更多还原