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LB法制备ZnO和MgxZn1-xO薄膜及其光学性能研究

Preparation of ZnO and MgxZn1-xO Thin Films by Langmiur-Blodgett Technique and the Research of the Optical Properties

【作者】 何宝珠

【导师】 唐冬雁;

【作者基本信息】 哈尔滨工业大学 , 无机化学, 2009, 硕士

【摘要】 采用LB技术在石英衬底上制备出ZnO薄膜以及MgxZn1-xO薄膜,研究了ZnO及MgxZn1-xO薄膜的成膜条件和拉膜条件,并对制备的ZnO及MgxZn1-xO薄膜进行了X射线衍射分析(XRD)、紫外-可见光谱(UV-Vis)分析及原子力显微镜(AFM)的表征。对不同层数及不同Mg掺杂量对MgxZn1-xO光学性能的影响进行了探讨。通过LB膜技术,确定了较佳的亚相浓度,滑障速度,铺展液的静置时间,铺展量;在适宜的转移膜压、基片向上提拉速度、向下浸入速度,可获得转移比在1.0附近,性能稳定的硬脂酸/ZnO复合LB膜。在此基础上确定了亚相浓度,滑障速度,铺展液的静置时间,铺展量等较佳的MgxZn1-xO薄膜的成膜条件;转移膜压,基片向上提拉速度,向下浸入速度等拉膜条件,获得转移比在1.0附近,性能稳定的硬脂酸/MgxZn1-xO复合LB膜。通过热处理,获得了ZnO和MgxZn1-xO粉体及超薄膜。采用X射线衍射(XRD)检测其结晶状态,并通过紫外-可见光谱(UV-Vis)对复合LB膜的层间重叠情况进行了考查。ZnO及MgxZn1-xO复合LB膜及超薄膜的表面形貌及粒子覆盖度等信息,则通过原子力显微镜(AFM)进行了检测。采用PL光谱研究了不同层数和Mg掺杂量对ZnO及MgxZn1-xO薄膜光学性能的影响。掺入Mg后,薄膜的结晶质量提高。随着Mg的掺杂量x的增加,MgxZn1-xO薄膜的紫外发射强度增大;当x≥0.4时,紫外发射峰强度减小。在Mg掺杂量一定的情况下,随着提拉层数的提高,紫外发射峰的强度也会随之增加。

【Abstract】 The ZnO thin film and MgxZn1-xO thin films at the air/water interface have been transferred onto quartz substrates by Langmuir-Blodgett technique. Effects of different conditions of forming and preparing thin films were investigated. ZnO thin films and MgxZn1-xO thin films were then studied by XRD, UV–Vis spectroscope, atomic force microscope (AFM). ZnO and MgxZn1-xO thin films with different layer number and with different content of Mg-doping were studied on the test of optical properties.Through LB technique, favourable subphase concentration, barrier speed, temperature of the subphase, still time, pH value and spreading volume were confirmed. Then surface pressure, lifting speed upward and downward were investigated to form stable stearic acid/ZnO composite LB films with transfer ratio at 1.0. Favourable subphase concentration, barrier speed, temperature of the subphase, still time, pH value and spreading volume were confirmed. Then surface pressure, lifting speed upward and downward were investigated to form stable stearic acid/MgxZn1-xO composite LB films with transfer ratio at 1.0.Through heat treatment, ZnO and MgxZn1-xO powders and ultra-thin films were obtained. X-ray diffraction (XRD) was used to detect the crystalline state, and UV - visible spectrum (UV-Vis) was used to investigate overlap state of the composite LB film. The surface morphology and particle coverage information of ZnO and MgxZn1-xO composite LB film and ultra-thin films were determined by atomic force microscope (AFM).PL spectra were used to investigate the effects of different layer numbers and the content Mg-doping ZnO and MgxZn1-xO thin film on optical properties. After Mg was doped, the crystallization quality of thin film increased. With the amount of Mg doping x increased, MgxZn1-xO thin films of UV emission intensity increased. When x value is no less than 0.4, the UV emission intensity decreases instead. When Mg-doping content is certain, with the improvement of layer numbers, the intensity of UV emission peak will also increase.

【关键词】 LB技术ZnO薄膜Mg掺杂光学性能
【Key words】 LB techniqueZnO thin filmsMg-dopingoptical properties
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