【作者】 谢磊；

【导师】 闫永达；

【作者基本信息】 哈尔滨工业大学 ， 机械制造及其自动化， 2009， 硕士

【摘要】 纳米科技作为引领新一代技术革命的技术,近年来在信息、材料、生物、微电子等方面显示出重要的应用前景。有序纳米微结构材料是纳米技术的核心和基础材料之一,如何方便、可控地制备预定结构的纳米微结构材料,是当今纳米制造的热点问题。最新发展起来的嵌段共聚物自组装技术,能够自下而上的制备出纳米微结构,如何调控嵌段共聚物自组装过程对制备出高度有序的纳米微结构有重要的意义。本课题主要研究基底图案对嵌段共聚物自组装过程的调控作用。首先实现了AFM纳米加工系统的Z向闭环加工方式,运用研制的加法器电路实现开环加工方式与闭环加工方式的切换。对比了两种加工方式的特点,最终选择了对深度控制更加精确的闭环加工方式作为基底图案的加工方式。运用AFM纳米加工系统在铝合金及硅材料表面加工出了一系列二维、三维微结构。研究了进给量、垂直载荷对加工深度、表面粗糙度以及图案形状精度的影响规律,分析了采用灰度图方式能够加工得到高精度的三维微结构的原因。在加工好的基底上浇铸SEBS嵌段共聚物分子,研究了基底图案对自组装过程的调控作用。分析了不同的加工深度、表面粗糙度以及图案形状精度对自组装纳米微结构的影响。并同光刻技术加工的基底图案调控出的自组装纳米微结构做了对比,得到了应用AFM加工技术加工基底图案的优缺点。更多还原

【Abstract】 Nanotechnology as a leading technology in the new generation of technology revolution shows important applications in the field of materials, biotechnology, microelectronics, etc. in the recent years. Well ordered nanostructure is one of the key technology and basic material in the nanotechnology. How to fabricate nonmaterial conveniently and freely is the focus of the nanotechnology. The new bottom-up block copolymer self-assembly technology can fabricate periodic nanostructures over macroscopic length scales, so this technology has very important meaning in fabricating high ordered nanostructures.This paper studied the process of the block copolymer on the surface of the substrates with graphics. First of all, a Z direction closed-loop control approach had been achieved in the AFM nano-machining system by using the adder circuit, through which the closed-loop control method and the open-loop control method can be switched. Comparing the characteristics of the close-loop control methods and open-loop control method, the first was better for controlling Z direction therefore was chosen to machine the graphics on the surface of substrates.Second, a series of two-dimensional, three-dimensional microstructures was machined on the surface of the silica and the aluminum substrates using the AFM nano-machining system. The effects of the feed, the normal load on machining depth, surface quality and graphic precision were analyzed. The reason for getting the high precision picture by using the grayscale for its model was revealed.Finally, the SEBS was cast on the substrates with graphics to study the effects of graphoepitaxy on the block copolymer self-assembly. The effects of the machining depth, surface quality and the graphic precision on the process of the self-assembly were studied.更多还原