【作者】 温金开；

【导师】 徐征；

【作者基本信息】 大连理工大学 ， 微机电工程， 2009， 硕士

【摘要】 近年来,随着微流控芯片技术的不断深入和发展,纳流控芯片技术或微纳流控芯片技术也得到了快速的发展。微纳流控芯片在离子或分子的分离与富集的分析研究具有广阔的研究空间和应用前景。随着纳流控芯片通道尺寸的降低,纳米通道具有一些特殊的性质如表面电荷,双电层,粘度增加和电渗流降低等。这些特殊的性质使得微纳流控芯片在生化分析方面具有重要作用。本文重点研究了微纳流控芯片的制作方法,采用玻璃和聚二甲基硅氧烷(PDMS)制作微纳流控芯片,最后采用微纳流控芯片进行离子和蛋白的富集实验。由于玻璃材料具有很好的光学性能和电学性能,刻蚀的各向同向性和制造精度高等特点,因此本文优先采用玻璃材料来制作微纳流控芯片。结合微纳流控芯片结构特点,本文通过两块基片上采用光刻和湿法刻蚀的方法分别制作微米通道和纳米通道。通道形成以后,采用专门的对准装配装置对准,然后进行预联结,最后通过高温键合的方法永久性键合芯片。PDMS具有价格便宜,制作工艺比较简单,制作周期比较短的特点,因此PDMS在微流控芯片的制作材料上具有很大的优势。本文首先制作了PDMS的微米通道芯片的SU-8胶模具,通过软光刻的方法制作微米通道芯片。由合作单位进行键合,制作了上下两层是PDMS的微米通道芯片,中间一层是纳米孔膜的三明治结构的PDMS微纳流控芯片。最后,本文结合国内外富集原理初步分析了微纳流控芯片的特性:表面电荷,双电层和尺寸效应。本文在电驱动下的微纳流控芯片进行离子的富集实验,得到了高于富集溶液多倍的离子浓度。采用牛血清白蛋白(BSA/FITC)溶液作为富集溶液进行大分子的富集实验,也取得了很好的效果。更多还原

【Abstract】 In recent years, with the development of fabricating technologies of microfluidic chip, fabricating technologies of nanofluidic chip or micro-nanofluidic Chip has also been rapidly developed. Micro-nanofluidic chip is used in the research such as ion or molecular analysis, separation and enrichment, so it has broad research space and application prospect. With an increasing smaller size of Nanochannel flow, nanofluidic chip has some special properties such as surface electrical charge, the electrical double layer, increased viscosity and decreased electroosmotic flow. These special properties make micro-nanofluidic chip play an important role in biochemical analysis. This thesis focuses on the fabrication methods of micro-nanofluidic chip and has fabricated glass and PDMS micro-nanofluidic chip. This thesis uses micro-nanofluidic chip to do the efficient enrichment experiments of ions and protein at last.In this thesis, glass materials are used to fabricate micro-nanofluidic chip, because the glass material has excellent optical properties and electrical properties, and other good characteristics like all to the same anisotropic etching and high precision manufacture. Adding to the structural features of micro-nanofluidic chip, this thesis uses photolithography and wet etching process to fabricate microchannel and nanochannel chips respectively. Afer the channels are formed, the upper plate and the bottom plate can be assembled together by alignment, preconnection and thermal bonding sequently. At last, the bottom plate and the upper one are irreversibly linked together with thermal bonding.As PDMS material is a cheap and relatively simple production process with the feature of short production cycle. PDMS material has great advantages in microfluidic chip fabrication. The author fabricates a SU-8 mold of the PDMS microfluidic chip, and then employs the casting process to make a microfluidic chip. With the help of cooperating party, the PDMS micro-nanofluidic chip is finally fabricated where the bottom layer and the upper layer are both PDMS microfluidic chips while the middle layer is a mesoporous membrane. This is a micro-nanofluidic chip with sandwich structure.Finally, this thesis makes preliminary study of the characteristics of the micro-nanofluidic chip, surface charge, electrical double layer and the size effect. The ionic concentration of the solution is several times higher than before. The author also does a lot of experiments to explore the method of using BSA/FITC solution as a protein enrichment solution and achieved good results.更多还原