陶瓷基片激光加工技术的实验研究

【作者】 夏克贵；

【导师】 张骏；

【作者基本信息】 烟台大学 ， 光学， 2009， 硕士

【摘要】 陶瓷具有耐热性能高、硬度大、化学稳定性好等优异的机械、物理性能,在很多领域都有广泛的应用。由于陶瓷材料具有脆硬的特点,使用传统加工方法对其加工非常困难,加工表面容易产生破损,加工效率也不高。激光加工是最近出现的一种很有潜力的加工手段,具有很高材料去除效率。本文对影响激光陶瓷划片效果的技术进行了分析和实验研究,并以紫外激光划片为例,研究了速度、占空比、脉冲重复频率和离焦量等激光加工工艺参数对激光划片的影响。激光切割过程包括直接汽化材料和熔融材料的辅吹气体溅射两种方式,对陶瓷材料切割时,由于熔融态陶瓷有较强的黏附性,切割一般得不到很好的切边效果。本文提出在陶瓷下表面附薄层材料的方法来改善切边效果,并用实验验证了这种方法是可行的。更多还原

【Abstract】 Outstanding mechanical and physical properties like high thermal resistance, high hardness and chemical stability have encouraged use of ceramics in several applications. The brittle and hard nature of these ceramics makes them difficult to machine using conventional techniques and damage caused to the surface while machining affects efficiency of components. Laser machining has recently emerged as a potential technique for attaining high material removal rates. In thesis, a qualitative analysis and experimental verification of the effect of certain factors in relation to ceramics scribing is conducted, and take ultraviolet laser scribing as an example to analyze the effect of those processing parameter to the ceramics scribing, such as velocity, duty ratio, repeat frequency and off-focus offset. Laser machining ceramics is carried out by either direct vaporisation or assist gas ejection of laser-melted materials. For ceramics materials, due to the high viscosity of the materials in the molten state, it is difficult to achieve a clean cut. In order to improve this situation, this paper presents a method of attaching thin slab to the lower surface, and verifies it as a possible method by experiment.更多还原