【作者】 李琦；

【导师】 李泽湘； 廖大章； 楼云江； 张颖峰；

【作者基本信息】 哈尔滨工业大学 ， 控制科学与工程， 2008， 硕士

【摘要】 在现代机械系统领域,尤其是IC领域,高速高精运动控制由于它极高的生产能力和良好的性能成为这个领域的一个核心技术。由于IC生产特点是需要极端的尺度和速度,这就给我们一个极大挑战:如何在很短的时间、精确的定位条件下实现可重复的高加速运动。本论文系统的研究了三种不同的控制算法,并提出一种合适的控制算法来满足高速高精IC封装运动控制系统的要求。使用“计算机+运动控制器+伺服电机”的硬件结构来实现进行系统控制。同时使用该结构进行系统参数辨识。控制方法通过大量的试验来证实其有效性。通过研究比较使用陷波器进行抑制震动。针对传统的扰动观测器和零相误差跟踪器提出修正并应用。加速度速度前馈控制器被使用。实现三种不同的控制算法。在不同轨迹跟踪,扰动抑制,参数变动的条件下做大量实验并得出了一定的结论有助于深入研究。针对本控制系统,比较了控制算法的性能并给出最合适的控制算法在此系统中所达到的性能指标,实现了系统控制性能估计的指标。更多还原

【Abstract】 High-speed and high-accuracy motion control is one of the key techniques in modern mechanical systems, especially in the IC field. Since it achieves higher productivity and better quality. As IC manufacturing needs extreme dimension and speed, challenge arises as how to realize repeated high-acceleration motion within very short period and precise micro displacement. This thesis presents a systematic research on different control algorithms, and shows a proper controller of a high-speed and high-accuracy motion platform for the IC packaging purpose:According to the flexible requirements of research,“PC + motion controller + servo motor”hardware structure is utilized to take advantage of high integration of conventional open controller.Controllers with high performance are studied through multiple experiments; Notch filter is adopted in resonant compensation; disturbance observer and ZPETC are modified. Acceleration and velocity feed-forward controller are realized. Three kinds of control algorithms have been realized in this paper.Large amount of experiments under different trajectory tracking algorithms, disturbance resistance and parameter effects, are made and some significant conclusions have been drawn. Compare control performance with our system using different control algorithms, and give the performance of the most proper control algorithm in high-speed and high-accuracy motion control.更多还原