【作者】 李寿科；

【导师】 张新宝；

【作者基本信息】 华中科技大学 ， 精密仪器及机械， 2008， 硕士

【摘要】 直线度误差测量是一项基本的几何公差测量,将无衍射光技术,CCD成像技术和数字图像处理技术结合起来开发的无衍射光空间直线度测量仪适合于长短距离的直线度误差测量,为了进一步提高其测量精度,本文从影响无衍射光空间直线度测量仪的测量精度的各种误差因素出发,找出其误差根本,主要研究由于地倾斜固体潮带来的无衍射光光轴安装基础的误差,旨在从实质上提高无衍射光空间直线度测量仪的中长距离的测量精度,也为无衍射光应用于地倾斜仪的设计奠定理论基础和实践的可能性。本文采用理论推导和实验相结合的方法,首先从牛顿力学原理推导出天体之间的引潮位一般计算公式,采用球面谐函数和杜德森展开方法对引潮位进行二阶和三阶展开,利用最新的天文参数简化引潮位的展开计算,选取主要潮波并根据引潮位和地倾斜之间的关系采用MATLAB软件计算出地倾斜角变化规律,然后根据地倾斜角变化规律考虑实际情况得到无衍射光光轴安装基础的误差变化规律。理论计算结果表明无衍射光轴安装基础的误差随24小时周期规律变化,与光轴稳定性实验结果经小波变化后结论一致,所以在无衍射光直线度测量仪测量直线度过程中是存在由地倾斜引起的误差,其最大误差可达到6.5e-8rad,在超精密测量中必须予以考虑其影响,其误差补偿方法可以采用本文所述的直接补偿法。无衍射光光轴稳定性实验的误差分析证明了无衍射光光轴安装基础的误差存在,它也为将无衍射光应用于地倾斜仪的设计开发奠定了理论基础和实践的可能性。更多还原

【Abstract】 Straightness error is a basic parameter of the geometric tolerance measurement, The spatial straightness error instrument is designed by using non-diffracting beam technique, CCD imaging and digital image processing technology, which is adapt to measure straightness error both in long distance and short distance. To further improve its accuracy, this paper is based on all the factors of measuring error, finding out the real causes of measuring error, mainly studying the error of the non-diffracting beam’s installment base which is caused by earth tides. The aims of this paper are improving the accuracy of spatial straightness error instrument and ready for designing non-diffracting beam tilt-meter.This article uses the method which is unifying the theory reasoning and the experiment, at first uses Newtonian mechanics principle to infer the general formula of earth tide level between plnanets, uses the spherical surface harmonic function and the Doodson launches to carry on the tide level to second-order and third-order, uses the newest astronomy parameter to simplify the computation of the general formula, uses the MATLAB software to complete the computation of the tilt angular variation rule which is based on selecting several main tidal waves and relations between the tide level and the tilt, in the end gets out the variation rule on the error of the non-diffracting beam’s installment base which is based on the tilt variation rule and also thinking about actual situation.The results of computation indicate that the error of the non-diffracting beam’s installment base is varied along with 24 hour periodic law, which is consistent with the result of optical axis stability trial after wavelet changing. So the installment foundation error is existed in the procedure of the straightness error measurement by spatial straightness error instrument, which is caused by tilt. Its Maximum value was 6.5e-8rad, which must be considered in the super-precision measurement, the compensated method for the error is direct compensated method which has been shown in this article.The non-diffracting beam axis stability trial had proven the error of installment base to be existed by the analysis of error, which makes a ready for the design of non-diffracting beam tilt-meter.更多还原