【作者】 饶恒锐；

【导师】 唐霞辉；

【作者基本信息】 华中科技大学 ， 物理电子学， 2008， 硕士

【摘要】 本文旨在设计高功率板条波导CO₂激光器放电电极结构及其水冷装置。以面积放大理论为基础,确定板条电极的尺寸,设计符合要求的稳定的板条电极结构。根据传热学相关原理分析放电区气体的温度分布,计算热交换系统的相关参数,设计合理有效的电极水冷系统。在以下方面做了深入的研究。（1）以国内外射频激励CO₂激光器的研究成果为例,比较了平板波导结构、波导阵列结构的优缺点。平板结构以结构简单、易于实现等特点,在高功率板条波导激光器中得到了广泛的应用,但随着激光功率的提高,其器件结构紧凑性受到了限制。（2）推导了平板波导结构的面积放大理论,在确定的温度分布、气体配比条件下,计算了激光器的单位面积输出功率。（3）根据相关的放电理论和面积放大理论确定了放电极间距和放电极板的面积,并设计了一个由四块铝金属电极组成的放电增益结构,此结构简单、稳定、易于实现。为了在上下极板之间得到均匀放电电压,在上下极板之间并联一组谐振电感,可将电压波动范围控制在确定的范围内,并联电感的数目和大小与电压波动的范围、电极长度、激励频率和激光头阻抗相关。（4）分析了放电气体温度对激光器的影响及放电区的温度分布,建立了冷却系统的热平衡方程,对冷却系统的换热进行了计算,得出了水流道的流量,管径,管流压差等参数值。在此基础上设计了上下电极的水冷结构。通过对高功率板条波导CO₂激光器放电电极结构及其水冷结构的研究,为开发实用的高功率板条CO₂激光器提供了有益的技术探索。更多还原

【Abstract】 The thesis aims to design the electrode structure and its water cooling system of high power slab waveguide CO₂ laser. The size of the discharging electrodes is chosen based on“Power scaling of Large-area”theory. According to the related theory of heat transfer, electrodes structure is designed to meet the requirement, temperature distribution of gas in discharge area is analyzed, the correlated parameters of the heat exchange system are calculated, reasonable and effective water electrode cooling system is designed. Further researches are as following:（1） Advantages and disadvantages of the plate structure and waveguide array structure are compared On the basis of research results of RF excited slab CO₂ laser at home and abroad. Plate structure is simple and can be realized easily, so it is used widely in slab waveguide CO₂ laser. But the compaction of the laser devices is limited when increases output power.（2） The“Power scaling large-area”theory was deducted. At determined gas temperature profile and mixing proportion, the calculating result of ratio out power is present.（3） According to the relevant discharging theory and Power scaling large-area theory, the size of the discharging electrodes space and area is chosen, and a rectangular discharging gain structure that is composed of four Al electrodes is designed. In order to obtain uniform discharging voltage distribution, a group of resonant inductors between top and low electrodes are connected. It can restrict the voltage in the certain range. The number and value of the shunt inductor are related with voltage fluctuation range, electrode length, excited frequency and impedance of laser head.（4） Influence of Gas temperature on the laser and gas temperature distribution are analyzed. The equations of heat balance within the cooling system are established, calculation of heat exchanging are done. Parameter values of water flow rate, pipe diameter, pipe pressure difference are obtained. On the basis of that, the water cooling system of electrodes is designed.According to the research of electrode structure and its water cooling system for high power slab waveguide CO₂ laser, provides useful technical exploration for developing practical high power slab waveguide CO₂ laser.更多还原