【作者】 李佳；

【导师】 赖建军；

【作者基本信息】 华中科技大学 ， 光电信息工程， 2008， 硕士

【摘要】 随着现代科学技术的飞速发展,微光学技术的制作工艺有了极大的提高,作为重要的微光学元器件家族的一员-微透镜在许多领域有了广泛的应用和迫切的需求。由于光纤有着良好的柔韧性和光信号传递能力,近年来光纤用于传像领域的研究在国内外越来越得到重视,并且已经在军事方面比如导弹预警等领域发挥着巨大的作用。由于传像光纤束一般的填充系数很低,接收信号光能力较低,为了提高传像能力,提高信号利用率,有必要在光信号收集端集成微透镜阵列,使之与光纤束相配。本文介绍了基于某种传像光纤束制作微透镜阵列的工艺流程以及微透镜阵列与这种传像光纤束的集成,其主要内容如下:(1)从光学填充系数和几何光学的角度对折射微透镜阵列的设计理论进行了分析讨论,着重介绍了球冠形折射微透镜和方形折射微透镜的设计方法和计算公式,并利用ZEMAX光学软件对微透镜进行模拟分析,得到较为理想的微透镜的参数。(2)针对某种传像光纤束,研究了用于集成微透镜阵列的设计和制作方案,从前期的图像的采集和数据的计算、掩模版的设计,到后期的实验制作,重点研究了热熔成形法制作折射微透镜阵列的整个工艺流程,并对实验过程中的各流程的参数设置进行了介绍。(3)对实验制作出的折射微透镜阵列进行了扫描测试与分析,根据设计理论和公式对制作的微透镜的参数进行了计算,并利用ZEMAX根据其参数进行了聚光能力的模拟和分析。(4)研究了微透镜阵列与光纤阵列的集成方式,介绍了具体的集成方法,在自制的手动对准平台上实现了微透镜阵列与光纤束的集成。更多还原

【Abstract】 With the rapid development of modern science and technology, the manufacture process of micro-optics has greatly improved. As one of the most important devices in micro-optics, microlens is widely used in many fields and needed urgently. In recent years optical fibers used in transferring image field is more and more regarded because the fiber has good flexility and ability of sending optical signal and has great application in military field such as missile warning receiver system.Since optical fiber bundles inherently has low fill factor and low light gathering efficiency,to enhance the light transferring performance,it is desirable to integrate microlens array with optical fiber bundles.In this thesis manufacture process of refractive microlens matching a certain fiber array is presented and the integration technology is also given. The main contents of this thesis are as follows:(1) Present the design principle of the microlens at a viewpoint of optical fill factor and geometrical optical theory. Design formulas of the ball crown-shaped refraction microlens and square refraction microlens are given and structure parameters are obtained from simulating results by using ZEMAX software.(2) Design a manufacture process and give a detail description on the entire manufacture process including acquisition of imaging data,mask layout and processing schedule.Fabrication of refractive microlens array using thermal melting method are mainly studied.(3) Test and analyze the refraction microlens, and compute the parameters of the microlens according to the design theory and formulas, simulate and analyse the capability of gathering light for the microlens array.(4) Achieve the integration of optical fiber array with the microlens array by using a home-made alignment platform.更多还原