【作者】 孙静；

【导师】 曾平；

【作者基本信息】 吉林大学 ， 机械设计及理论， 2009， 硕士

【摘要】 压电泵是以压电陶瓷作为换能器的新型流体传输装置。它是利用压电材料的逆压电效应,使压电振子产生变形,再由变形产生泵腔的容积变化实现流体输出或者利用压电振子产生波动来传输液体。本文在单腔体主动阀压电泵研究的基础上提出主被动阀结合的双腔串联压电泵的设计方案,对其工作机理进行比较系统的理论研究,并进行试验测试,为主动阀压电泵的深入研究奠定了基础。同时也为提高压电泵的输出特性提供一种新的方法。具体研究内容如下:以圆形双晶片压电振子为研究对象,对压电振子的振动进行理论研究。建立了数学模型,并用有限元方法分析双晶片压电振子的结构参数与压电振子性能间的关系,确定压电振子的结构参数。同时对选定的压电振子进行静态和模态分析,并通过试验测试其振动特性,为压电泵的设计提供理论依据。设计制作圆形双晶片压电振子式主动阀,依据两固定平行平板间的缝隙流原理推导阀的理论流量公式,分析影响主动阀流量的主要因素,确定阀口的主要参数,并对主动阀的过流量进行试验测试。在研究主动阀单腔泵的基础上,利用腔体结构串联设计主被动阀结合的双腔串联压电泵,从理论上分析各自的工作原理及工作过程。制作工作样机,测试它们的工作特性,并对单腔泵和双腔串联泵进行比较分析。更多还原

【Abstract】 With the rapid development of Micro-electro-mechanical systems (MEMS), micro-flow system, as an important branch of micro-electro-mechanical systems, it has enjoyed great development in recent years. The micro-pump, as a key components of micro-flow system,researchers have also been widespread concern. Piezoelectric pump, due to their no electromagnetic interference, compact structure, good response characteristics and precise controlled. etc., has become a hot research direction in domestic and abroad. Performance of Piezoelectric pump depends not only on cavity pump drive components, but also on the work forms of import and export valve. In order to improve the response characteristics of valve, it can be actively control open and close of piezoelectric pump import and export valves, so based on the active valve piezoelectric pump are the study of a new direction. In this paper, based on a single chamber active valve piezoelectric pump ,it put forward dual-chamber tandem piezoelectric pump of combination of active and passive valves in order to improve the output performance of piezoelectric pump.1. Introduction of piezoelectric pumpThis paper analyzed structural characteristics and working principle of various piezoelectric pumps in domestic and abroad, in order to improve the lagging performance of passive valve, it has become a hot research to control import and export of piezoelectric pump through active valve, it is the main purpose of this paper to improve the output performance of active valve piezoelectric pump.2. Theory and simulation analysis of piezoelectric vibrator used for pumpIt analyzed the working principle and piezoelectric material of piezoelectric vibrator used for pump , selected the structure of piezoelectric vibrator, and set up a mathematical model for piezoelectric vibrator. on this basis, analyzed vibration mode of piezoelectric vibrator constituted with piezoelectric ceramic and a two-storey metal plates driven by voltage according to the vibration of thin plate theory, and gave a geometric equation, and gave the ease of approximate solutions for engineering calculation through the Rayleigh-Ritz method. This paper set up the mathematical model of circular bimorph piezoelectric vibrator, analyzed factors respectively such as substrate materials, ceramic thickness, substrate thickness by finite element analysis method, obtained the relationship between deformation with influencing factors, on this basis, optimized structure of bimorph piezoelectric vibrator, and selected piezoelectric vibrator, gave simulation analysis of static and dynamic characteristics of the piezoelectric vibrator.3. Experimental research on piezoelectric vibrator used for PumpSet up experimental testing system of bimorph piezoelectric vibrator, studied the deformation impact of different drive signals included different waveforms, different locations, different voltage, obtained respective response curves. It found that the deformation of piezoelectric vibrator has great relation with the drive signal through testing, when used different drive signal ,piezoelectric vibrator can obtain different deformation , when driven by sine wave and rectangular wave signals ,obtained deformation is bigger, the triangle wave is smallest. At the same time, the deformation of piezoelectric vibrator and drive voltage showed good linear relationship, it can be adjusted by changing the driving voltage to change oscillator deformation. The deformation of piezoelectric vibrator generated by frequency is very significant differences, when frequency is low, the deformation is large, when high-frequency, and the deformation is very small. It can adjust the frequency of piezoelectric vibrator to look for the best working conditions of piezoelectric pump.4. Research on active valve driven by piezoelectric vibratorDesigned an active valve driven by circular bimorph piezoelectric vibrator, and analyzed the structure and its working principle of the active valve. According to designed active valve structure, based on two fixed parallel plates gap flow, derived theory flow formula through valve, obtained that width of valve seat and inner radius of valve are major factor impacting flow by the formula. According to the formula of valve flow, analyzed the relationship between the theory flow with width of valve seat and the inner radius of valve by using MATLAB, and in according to optimized principles of much pressure and as small as fluid loss possible, selected structural parameters of the active valve. Finally, tested pressure, flow, and leakage properties of active valve driven by circular piezoelectric vibrator through experimental methods, has laid a foundation for design of active valve piezoelectric pump later.5. Design and research on piezoelectric pumpBased on the structure, working principle and output performance analysis of single-cavity active valve piezoelectric pump, mainly designed dual-chamber tandem piezoelectric pump of combination of active and passive valves by using chamber tandem, In order to improve response properties and actively control import and export’s valves, valves of import and export is controlled by the active valve of piezoelectric vibrator, it had a passive valve (rubber umbrella valve) between the two cavity, so can separate the two chamber. Produced prototype of single-chamber active valve pump and dual-chamber tandem piezoelectric pump and made experimental test. Tested the output flow - frequency characteristics, the output flow - voltage characteristics, the output pressure - frequency characteristics, the output pressure - voltage characteristics of single-chamber pump and dual-chamber pump , can obtain the best performance of piezoelectric pump by adjusting driven voltage and frequency from the test results, and compared their job performance , in the same working conditions, obtained the conclusion that output flow and output pressure of the dual-chamber tandem of combination of active and passive valve is superior to single chamber active valve piezoelectric pump.更多还原