【作者】 张雪静；

【导师】 温志渝；

【作者基本信息】 重庆大学 ， 光学工程， 2008， 硕士

【摘要】 光谱分析仪器是对物质的化学组成及含量进行分析的重要仪器。随着微型光谱仪的研究成功和应用,芯片式集成光谱分析系统又成为人们探索的重点。本论文在国家自然科学基金的资助下,提出采用MEMS和微电子等技术进行微型F-P腔式阵列光谱探测器集成化关键技术的研究,以期构成一种小体积、高光通量、高灵敏、高可靠性的集成F-P腔阵列光谱探测器。论文的主要研究工作如下:①通过查阅国内外文献资料,在本中心前期研究微型光谱分析仪器成果的基础上,提出了基于微型F-P腔阵列的光谱探测器集成化技术研究的思想;②研究了微型F-P腔阵列光谱探测器的结构和工作原理,进行了相关理论和结构的分析,确定了系统方案;③提出采用N阱P衬底结构光电二极管为探测器,获得了光电二极管的SPICE模型和参数;④根据系统工作原理,设计了该光谱探测器的读出电路,该电路采用一种包含动态源随器和采样保持电容的采样电路,同时使用移位寄存器来实现信号逐位扫描输出,该电路具有结构简单、功耗低、去噪效果好等特点;完成了系统级模拟;⑤在对整体工艺进行研究的基础上,从集成化角度出发,给出该微型F-P腔阵列光谱探测器的加工工艺流程和要求,基于MOSIS/ORBIT 2.0U SCNA工艺,采用tanner软件完成了8个单元探测器和读出电路的版图设计,进行了DRC、版图提取以及版图后仿真,验证了所设计的版图的正确性。更多还原

【Abstract】 The optical spectrometer is an important instrument for analyzing the chemistry constitute and content of the material. The chip type integrated spectral analysis system becomes the key point which the people explore. This thesis is subsidized by the national natural science fund, which makes a study on Integrated key technology of Micromation F-P-type cavity Array Spectral Detector by adopting MEMS and IC technology, and hope to constitute a integrated F-P-type cavity Array Spectral Detector with small size, high-Luminous flux, high-sensitivity, high reliability. It’s major research contents as follows:①. This thesis putted forward make a study on Integrated key technology of Micromation F-P-type cavity Array Spectral Detector by consulting a number of literature at home and abroad and the achievement about microspectrometer in our lab.②. Ihis thesis made a study on structure and principle of the Micromation F-P cavity Array Spectral Detector, analyzed the related theory and determined the system program.③. It adopted N+/P photodiode as the detector, and got the SPICE model and parameter of the photodiode.④. Based on the principle of the system, we designed the readout circuit which contained dynamic source follower and sampling maintain capacitance, and used the shift register to scan the signal and bit by bit transfer. This circuit had simple structure, low power consumption and effective denoising. Besides we had completed the Pspice System-level simulation.⑤. Researched on the overall process, the thesis gave the process chart and request of the Micromation F-P cavity Array Spectral Detector, then used tanner to design layout of 8 cells detector and readout circuit by adopting MOSIS/ORBIT 2.0U SCNA. We carried out DRC, extraction, post layout simulation, and proved validity of the layout.更多还原