【作者】 孙奉道；

【导师】 孙宝元；

【作者基本信息】 大连理工大学 ， 机械电子工程， 2008， 硕士

【摘要】 本课题属于切削温度测试研究领域,课题来源于辽宁省自然科学基金项目,项目编号（20062143）和辽宁省教育厅高校科技计划,项目编号（05L023）。本文主要研究瞬态测温传感器——嵌入式薄膜热电偶测温刀具传感器的研制及其性能研究。切削温度直接影响工件的热变形、已加工表面质量、刀具前刀面积屑瘤的产生和消退以及刀具寿命等众多因素,因而现代制造业对切削温度的监测要求逐步提高。铝合金高速切削过程中产生大量的切削热,由于切削速度高,切削热来不及传给工件就被高速流出的切屑带走,工件和刀具累积热量极少。切削热主要集中于刀尖处,而切削区域埋藏于工件内,处于半封闭状态,目前常用的测温方法无法测量刀尖处的切削温度,只能测量距离刀尖一定距离的平均温度。本文研制出一种嵌入式复合薄膜热电偶刀具温度传感器,该传感器集切削、测温为一体,可以快速并精确地测量刀具刀尖处的切削温度。论文的主要内容包括:薄膜热电偶测温传感器的结构优化设计,磁控溅射方法制备SiO₂绝缘膜、热电偶薄膜电极,测温传感器的静态标定、动态标定及切削温度测量试验,薄膜热电偶磨损误差分析等。其中,SiO₂绝缘膜、薄膜电极的制备以及薄膜热电偶磨损误差分析是本论文工作的重点。通过增加磁控溅射射频偏压的方法,使薄膜热电偶与基体之间的结合力得到改善。采用数控线切割慢走丝加工掩模,使其形状规则、热变形量小。磁控溅射得到的热电偶薄膜膜层致密均匀、平整光滑、边界清晰、在热电极尺寸缩小70%的情况下仍能保证连续。对热电偶进行静态标定和动态标定,得出薄膜热电偶的灵敏度为66.9μV/℃,线性误差不大于0.45%。通过采用两种激光器作为激励热源,分别得到一阶系统的阶跃响应和脉冲响应,热电偶响应时间接近0.25ms。分别制作热接点宽度为1.0mm,0.8mm,0.5mm,0.3mm的热电偶来模拟热电偶磨损过程,实验结果证明热接点宽度从1.0mm～0.3mm对静态和动态数据影响不大,说明热电偶的磨损不会影响其精度和响应时间。更多还原

【Abstract】 The paper is in the field of cutting temperature measurement, which is under the support of Natural Science Foundation of LiaoNing Province（No.20062143） and Plan for Scientific and Technological Industry in Colleges and Universities of LiaoNing Educarion Department. （No.05L023）. The present work dedicaes to the development of tempreture sensor——Fabrication and Characterization of Tools with built-in thin film thermocouple sensors.Cutting temperature directly impact the thermal deformation of workpiece, the quality of processed surface, the area cutter knife before the debris generation and tumor regression, as well as a number of factors, so modern manufacturing industry gradually increase the requirements of monitoring cutting the temperature. In the process of high-speed cutting of aluminum alloy bring a large amount of heat, as the cutting speed is too high, cutting heat has not enough time to take away by the outflow of high-speed chip, a little temperature has been accumulated on the workpiece, and almostly maintain room tempetature. Cutting heat concentrated in the tip, and cutting jobs in the region are buried, in a state of semi-closed, the conventional method of temperature measurement can not touch on the cover of the region. This paper developed tools with built-in thin film thermocouple sensors, which intgrates botll cutting and temperature measuring functions , can quickly and accurately measuring the cutting tool tip Department temperature.This paper contains: structure optimized design of the TFTC tempreture sensor, the fabrication method for SiO₂ insulating coating, thermocouples thin-film by the Magnetron Spurting, static calibration, dynamical calibration, error analysis of dynamical cutting tempreture, the thermocouple film abrading error analysis and so on. Among these, the manufacturing of SiO₂ insulating coating, thin-film electrodes, the thermocouple film abrading error analysis are the key project and have been emphasized in this paper.By increasing the RF bias voltage of magnetron sputtering, the bonding between thin-film thermocouple and substrate has been improved. The mask made by the numerical controlled linear cutting machine, which has regular shape and small thermal deformation. The thermocouple film made by magnetron sputtering has compactive and smooth thickness, clear boundary, continuous even the size reduced 70%. The static and dynamic calibration of TFT-C are proposed, and it is concluded that the sensitivity are 66.9μV/℃, linear error is no greater than 0.45% . Through using two kinds of laser as heat source, the experiment has got first-order system step response and impulse response respectively, the thermocouple response time close to 0.25ms. In order to research the process of the thermocouple wear out,four kinds of hot node width has been made to simulate the process, the results demonstrate that the heat node width made a little influence to the static and dynamic data,so we can say that the thermocouple Wear and tear will not affect its accuracy and response time.更多还原