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旋转喷镀法合成Ni-Zn铁氧体薄膜

Synthesis of Ni-Zn Ferrite Films by Spin-spray Plating Method

【作者】 胡清平

【导师】 董泽华;

【作者基本信息】 华中科技大学 , 应用化学, 2007, 硕士

【摘要】 本文主要目的是用旋转喷镀法制备Ni–Zn铁氧体薄膜。通过FeCl2+NiCl2+ZnCl2组成的还原液和CH3COONH4+NH3H2O+NaNO2组成的氧化液不断地向转盘上的玻璃基片喷镀,在90℃下反应制备了厚度1–2μm的Ni–Zn铁氧体薄膜。利用X射线衍射(XRD)确定样品的物相,用扫描电子显微镜(SEM)观察分析了薄膜的形貌,用振动样品磁强计(VSM)和矢量网络分析仪测量了薄膜的磁性能。在实验中,研究了氧化液pH值、不同Zn含量以及掺Co对薄膜性能的影响。得到如下结论:当氧化液的pH值从8.0增大到8.8时,薄膜的沉积速率和表面粗糙度都相应提高。X射线衍射(XRD)显示制备的薄膜具有尖晶石结构铁氧体的特征衍射峰。氧化液pH值为8.0时,薄膜有更高的饱和磁化强度、更大的矫顽力以及更大的复磁导率。制备的薄膜显示了210.3kA/m的高饱和磁化强度和1.218kA/m的低矫顽力。当Zn含量从0.1增大到0.6时,薄膜的饱和磁化强度Ms先增大后减小。当Zn含量为0.3时,薄膜的饱和磁化强度Ms为147.8 kA/m,矫顽力为2.489kA/m。当Co含量从0增大到0.09时,薄膜的复磁导率先增大后减小,电阻率ρ一直增大。镍锌钴铁氧体薄膜组成中Co含量为0.03时的薄膜较均匀、致密。当Co含量为0.03时的复磁导率的实部μ′在大约1.7GHz时达到最大值72.5,虚部μ″在大约2GHz时达到最大值107.5。

【Abstract】 Ni–Zn ferrite films were synthesized by spin-spray plating method. Ni–Zn ferrite films with thickness of 1–2μm were prepared by spin-spray plating method at 90℃on glass substrates from the deoxidizing solution of FeCl2+NiCl2+ZnCl2 and the oxidizing solution of CH3COONH4+NH3H2O+NaNO2. The composition of samples was identified by means of X-ray diffractometer (XRD).The morphology of samples was examined by scan electron microscope (SEM).Magnetic properties were measured by vibrating sample magnetometer (VSM) and vector meshwork analyzer.Based on experimental study, the effect of conditions which include the pH value of oxidizing solution, the content of Zn and the addition of Co on the properties of films was investigated.When the pH value of oxidizing solution increases from 8.0 to 8.8, both the deposition rate and surface roughness of the films increase.XRD pattern shows that the diffraction peaks of the deposited film are corresponding with characteristic peaks of the spinel ferrite. When the pH value of oxidizing solution is 8.0,the film has higher saturation magnetization, lower coercivity and larger complex permeability.This film exhibits a large saturation magnetization of 229kA/m and low coercivity of 0.693kA/m.When the content of Zn increases from 0 to 0.6,the saturation magnetization(Ms) of films roses firstly and the declines. When the content of Zn is 0.3, the film exhibits a large saturation magnetization of 147.8 kA/m and low coercivity of 2.489kA/m.When the content of Co increases from 0 to 0.09, the complex permeability value of films roses firstly and the declines.When the content of Co is 0.03, the film is even and compact. The real part of complex permeabilityμ′at about 1.7GHz of the frequency is at the maximum of 72.5. The imaginary part of complex permeabilityμ″at about 2 GHz of the frequency is at the maximum of 107.5.

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