【作者】 陈晓辉；

【导师】 刘晓军；

【作者基本信息】 华中科技大学 ， 测试计量技术及仪器， 2007， 硕士

【摘要】 随着现代制造朝着高精密方向发展,满足一般实验和生产条件下的低成本、方便实用的高精密位移计量测试手段和测量传感器面临紧迫的需求。本文研究一种基于双光栅干涉原理位移传感器。由于衍射干涉的采用,该传感器具有大量程、高分辨率与高精度,同时由于是双光栅干涉,其结构简单、紧凑,具有良好的稳定性和抗环境干扰能力,因而适合一般实验和生产条件下高精密位移测量需要。本文对双光栅干涉进行了深入研究,导出了双光栅干涉位移测量的基本原理,在此基础上,完成了双光栅干涉位移传感器系统的设计,包括机械系统设计和信号处理电路设计,并构建了系统实验装置,该装置由半导体激光器、双光栅干涉单元、位移导向机构、干涉条纹光电接收与信号处理电路、计数细分与位移数显单元等,其设计测量范围达15mm,分辨力达0.01μm。论文对影响系统精度特性的主要因素,包括机械、光学、电气因素进行了分析。最后,利用建构的实验装置,对系统进行了测试实验。初步实验结果显示系统易于实现良好的精度特性和稳定性,能满足一般实验和生产条件下高精密位移测量需要。更多还原

【Abstract】 With the development of modern manufacturing, high precision measuring and displacement sensor is used more urgently which is low cost and convenient in normal experiment and production conditions.In this paper, a kind of displacement sensor based on the principle of double grating interference is introduced. Owing to the diffraction and interference, this displacement sensor has large measurement range, high accuracy, And because of double grating interference, it takes less room, is very steady, and has ability to resist environment noise. So it meets the need of high precision measuring in normal experiment and production conditions.First of all, double grating interference is researched deeply in this paper. And make out the principle of two gratings interference. Second, a double grating interference displacement sensor system is designed, and this system contents the mechanical system design and the signal processing circuit design. A experimental device is made. And it is made up of semiconductor laser, double grating interference cell, displacement guiding mechanism, photoelectric receiver, the signal processing circuit and so on. The design measurement range can reach 15mm, the resolving power can reach 0.01μm. Third, the analysis about system accuracy and factors such as mechanical factors, optical factors and electric factors which shall influence the accuracy is worked out.At last, testing experiment is carry out based on the experimental device. Initial experiment result proves that the system has a good accuracy character and stability, and could meet the need of high precision measuring in normal experiment and production conditions.更多还原