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解耦结构微机械陀螺特性研究
Research on Characteristic of Decoupled Microgyros
【作者】 韩天；
【导师】 陈伟平；
【作者基本信息】 哈尔滨工业大学 ， 微电子学与固体电子学， 2007， 硕士
【摘要】 微机械陀螺是MEMS技术应用在惯性传感器领域继微机械加速度计之后的又一重大突破。陀螺技术不但在军事、航空、航天领域发挥着巨大作用,而且在国民经济的其它领域中也获得应用,为国民经济的发展发挥着重要作用。因此开发高性能、低成本的微机械陀螺对于国家来说不仅具有很强的战略意义,同时也具有一定的经济意义。本课题的主要内容是微机械陀螺的特性研究:首先,对结构的频响特性进行研究,介绍了模态匹配对陀螺性能的影响,重点进行了全对称解耦结构陀螺的模态仿真和陀螺结构频响特性的测试,谐振频率分布在2.3kHz~2.5kHz之间,实验结果验证对称结构可使陀螺的两模态达到预期的匹配程度,通过频响特性曲线计算大气压下Q值为199,证实滑膜阻尼模型可以使陀螺实现大气压下工作;其次,对结构的解耦性能进行研究,理论建模分析了结构解耦性能,用有限元仿真软件进行结构解耦特性的仿真,仿真结果为模态间交叉耦合小于0.2%,对结构的解耦效果进行测试,结构解耦达到预期效果;最后,对结构非线性进行研究,介绍了非线性对陀螺性能的影响及产生原因,通过有限元仿真和曲线拟合,得到陀螺结构弹性梁的非线性关系,并根据仿真结果分析了非线性对系统谐振频率的影响并用测试证实在考虑非线性的情况下系统谐振频率随驱动力振幅的增大而增大。本论文所研究的内容,对振动式微机械陀螺的优化与设计具有一定的理论和实践意义,同时也为研制高性能、实用化的微机械陀螺奠定基础。
【Abstract】 After micromechanical accelerometer, micromechanical gyroscope is an another important improvement in MEMS. The technology of gyroscope is wildly used in military affairs, navigation and is playing an important part in other fields of economy. So developing a micromechanical gyroscope with high performance and low cost is important in military affairs and economy of the country.In this paper, the performances of micromechanical gyroscopes are researched. First, the performance of frequency response is researched. The simulation and test result of the structure, which agree well, show that the natural frequency is between 2.3kHz and 2.5kHz and the driving mode matches well the sensing mode. The quality factor which is calculated by the frequency response curve is 199 at atmospheric pressure. Second, decoupling is researched by theory simulation and test. The test result shows that the decoupled structure has good effect and the coupling between the driving mode and sensing mode is under 0.5%. At last, the nonlinearity of spring is researched. The nonlinear factor is got from the simulation results, which is used to calculate that the natural frequency increases with the augment of the driving force. The conclusion is also proved by the test result.The contents studied in this thesis have the theoretical and practice significance to the design and improvement of gyroscope with high performance.